From gsosa at stanford.edu  Fri Jan 11 09:53:30 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Fri, 11 Jan 2013 09:53:30 -0800 (PST)
Subject: [svgcoat2-pcs] Comment svgcoat2 SNF 2013-01-11 09:53:30: 955-7
	0.7um Thickness
Message-ID: <23702030.43.1357926810938.JavaMail.coral@snc-coraldb.stanford.edu>

Resist:955-7
Target: 0.7 microns
Mean: 7184 A (0.718um)
Std. dev: 12 A

From gsosa at stanford.edu  Fri Jan 11 09:55:12 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Fri, 11 Jan 2013 09:55:12 -0800 (PST)
Subject: [svgcoat2-pcs] Comment svgcoat2 SNF 2013-01-11 09:55:11: 955-7
	1.0um Thickness
Message-ID: <4655671.44.1357926912148.JavaMail.coral@snc-coraldb.stanford.edu>

Resist: 955-7
Target: 1.0 microns
Mean: 9940 A (0.994um)
Std. dev: 15 A

From gsosa at stanford.edu  Fri Jan 11 09:56:27 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Fri, 11 Jan 2013 09:56:27 -0800 (PST)
Subject: [svgcoat2-pcs] Comment svgcoat2 SNF 2013-01-11 09:56:26: 955-7
	0.9um Thickness
Message-ID: <12684416.45.1357926987311.JavaMail.coral@snc-coraldb.stanford.edu>

Resist:955-7
Target: 0.9 microns
Mean: 8937 A (0..894um)
Std. dev: 13 A

From gsosa at stanford.edu  Fri Jan 11 09:58:53 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Fri, 11 Jan 2013 09:58:53 -0800 (PST)
Subject: [svgcoat2-pcs] Comment svgcoat2 SNF 2013-01-11 09:58:52: 3617M
	1.26um Thickness
Message-ID: <26619597.46.1357927133610.JavaMail.coral@snc-coraldb.stanford.edu>

Resist: 3617M
Target: 1.26 microns
Mean: 12649 A (1.265um)
Std. dev: 42 A

From gsosa at stanford.edu  Fri Jan 11 10:01:03 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Fri, 11 Jan 2013 10:01:03 -0800 (PST)
Subject: [svgcoat2-pcs] Comment svgcoat2 SNF 2013-01-11 10:01:03: 3617M
	1.6um Thickness
Message-ID: <21235256.47.1357927263880.JavaMail.coral@snc-coraldb.stanford.edu>

Resist: 3617M
Target: 1.6 microns
Mean: 16056 A (1.606um)
Std. dev: 3 A

From ludwig at snf.stanford.edu  Mon Jan 14 16:00:38 2013
From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu)
Date: Mon, 14 Jan 2013 16:00:38 -0800 (PST)
Subject: [svgcoat2-pcs] Problem svgcoat2 SNF 2013-01-14 16:00:38: wafers
	suck on hot plate
Message-ID: <9079559.28.1358208038897.JavaMail.coral@snc-coraldb.stanford.edu>

after the bake, the wafers remain stuck on top of the hot plate
50 % of time
Tx

From vilanova at stanford.edu  Tue Jan 15 09:20:25 2013
From: vilanova at stanford.edu (vilanova at stanford.edu)
Date: Tue, 15 Jan 2013 09:20:25 -0800 (PST)
Subject: [svgcoat2-pcs] Problem svgcoat2 SNF 2013-01-14 16:00:38: wafers
 suck on hot plate
Message-ID: <20142982.7.1358270425392.JavaMail.coral@snc-coraldb.stanford.edu>

Cleaned up Hotplate and belts, tested Ok
Ready to use 

From cechang at stanford.edu  Wed Jan 23 14:27:04 2013
From: cechang at stanford.edu (cechang at stanford.edu)
Date: Wed, 23 Jan 2013 14:27:04 -0800 (PST)
Subject: [svgcoat2-pcs] Problem svgcoat2 SNF 2013-01-23 14:27:04: 955 bad
	spin
Message-ID: <13362301.100.1358980024073.JavaMail.coral@snc-coraldb.stanford.edu>

Ran 24 wafers in a row last night. All of them had bad spin around the edge.

From gsosa at stanford.edu  Fri Jan 25 15:20:33 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Fri, 25 Jan 2013 15:20:33 -0800 (PST)
Subject: [svgcoat2-pcs] Problem svgcoat2 SNF 2013-01-23 14:27:04: 955
	bad spin
Message-ID: <32011538.6.1359156033175.JavaMail.coral@snc-coraldb.stanford.edu>

Checked and adjusted wafer centering.. Found supply CDA and Nitrogen pressure in the inger wall low. Could have had an efect on the 955 resist pump which operates with nitrogen. Tested coat process with standard 955 0.7 process on clean bare silicon wafers. All 15 wafers looked good. Thickness mean: 7.1 microns, Std Dev: 7 A. OK to use.

From jimkruger at yahoo.com  Fri Jan 25 18:14:08 2013
From: jimkruger at yahoo.com (jimkruger at yahoo.com)
Date: Fri, 25 Jan 2013 18:14:08 -0800 (PST)
Subject: [svgcoat2-pcs] Problem svgcoat2 SNF 2013-01-25 18:14:08: TRACK FAILS
Message-ID: <9203561.15.1359166448848.JavaMail.coral@snc-coraldb.stanford.edu>

Track 2 fails to drop wafer into belt after bake.  Requires remoale of wafers, manual bake if needed, rest sytem and re-stat.  3 occurances in my 17 wafers

From vilanova at stanford.edu  Mon Jan 28 08:07:20 2013
From: vilanova at stanford.edu (vilanova at stanford.edu)
Date: Mon, 28 Jan 2013 08:07:20 -0800 (PST)
Subject: [svgcoat2-pcs] Problem svgcoat2 SNF 2013-01-25 18:14:08: TRACK
	FAILS
Message-ID: <25568549.29.1359389240758.JavaMail.coral@snc-coraldb.stanford.edu>

I've ran All the dummy wafers through the system , Using 
recipe #1 , bake # 1 , A total of 10 wafers (twice)Could not
Repeat the User Problem , The Onyl thing I found was the Small carboy
Under the system was Full , If it is the system will fail or it will shutdown
until Someone Empty it. Please make sure the small carboy is Empty before you run your wafers.