Fwd: failure notice
beckwith at snf.stanford.edu
Wed Mar 13 12:54:24 PST 2002
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>Date: 13 Mar 2002 20:45:18 -0000
>From: MAILER-DAEMON at snf.stanford.edu
>To: beckwith at snf.stanford.edu
>Subject: failure notice
>Hi. This is the qmail-send program at snf.stanford.edu.
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><svgcoat2-pcs at snf.stanford.edu>:
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>Subject: Problem svgcoat2 2002-03-13 12:45:16: strange bubbly
>pattern in resist
>Date: Mar 13, 2002 12:45:17 PM
>From: beckwith at snf.stanford.edu
>To: svgcoat2-pcs at snf.stanford.edu
>(maybe EBR drips?) used the YES oven, no svg prime,
>3612, no edge bead removal.
>I left the wafers in Theresa's storage bin E42 , Mahnaz,
>please look at them using the green light and let me know
>if you thing the resist will hold up to a no-align exposure and
> a wet long etch.
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