From mahnaz at snf.stanford.edu  Thu May  9 11:20:08 2002
From: mahnaz at snf.stanford.edu (Mahnaz)
Date: Thu, 09 May 2002 11:20:08 -0700
Subject: up date
Message-ID: <3CDABDD8.CF0D0233@snf.stanford.edu>


Hello all,

I am pleased to let you know that the sensor up grade on both svg track
has gone through very successfully and now you can run glass and quartz
wafers exactly like silicon wafers the SVGdev  has gone through the same
up grade as well.
The new sensor is Fairchild air sensor and when the wafer passes through
it signals a back pressure and sense a small voltage.

I am also optimizing the 3617M resist for glass and quartz and looking
very good.  I was able to resolve 1 um line on glass substrate.

mahnaz




From mahnaz at snf.stanford.edu  Fri May 24 12:07:17 2002
From: mahnaz at snf.stanford.edu (Mahnaz)
Date: Fri, 24 May 2002 12:07:17 -0700
Subject: Not Allowed
Message-ID: <3CEE8F65.6FF98DDB@snf.stanford.edu>


To all,

I like to remind all of you that, we do not allow any DISPENSE of LOL
2000, any kind of POLYIMIDE,   PMMA 950K --->9% and 495K---> 9% on
either SVG tracks. This is very damaging to the system and every ones
process.
If I come across it I will remove individuals name for a whole month
with out any hesitation at all. If there is a process issue, I am open
to discuss the matter.

mahnaz