From mahnaz at snf.stanford.edu Mon Nov 3 16:58:12 2003 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Mon, 03 Nov 2003 16:58:12 -0800 Subject: up date Message-ID: <3FA6F9A4.A4828107@snf.stanford.edu> Hello all, I like to report that Mike and Mario had spend a lot of time on the track 2 to fix the non uniformity. I checked the 1 um process and the thickness (1 um) across the wafers is 180A difference. I exposed the wafers on KS2 and 1 Um was resolved with Vacuum contact and 1.2 second of exposure and of course 60 second of PEB. I am in process of checking 220-3 resist on SVG track 2. PLease report any problems or comments you have on Coral that will be very helpful to all of us. mahnaz From mahnaz at snf.stanford.edu Tue Nov 25 16:49:24 2003 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Tue, 25 Nov 2003 16:49:24 -0800 Subject: Up date Message-ID: <3FC3F894.7A7829C1@snf.stanford.edu> Hello all, I Like to give a a little up date on the status of the track, although is not very positive we have spent quiet a lot of hours on the track. It all started with noticing non uniformity with 220-3 resist and plus EBR splashes. We have made many adjustment that I do not want to get in to that. In short the EBR issue is caused by the tip of nozzle which is not smooth and we noticed some scratches so we will order a new nozzle. I ran few wafers with 1 um and 1.6 um and it looked very good but 100% inspection of wafers are required for now and please report any issues to us. 220-3 is not satisfactory and I like to keep that recipe under yellow light. Mario and I planning to spend more time on the track tomorrow. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: