mahnaz at snf.stanford.edu
Mon Nov 3 16:58:12 PST 2003
I like to report that Mike and Mario had spend a lot of time on the
track 2 to fix the non uniformity.
I checked the 1 um process and the thickness (1 um) across the wafers is
180A difference. I exposed the wafers on KS2 and 1 Um was resolved with
Vacuum contact and 1.2 second of exposure and of course 60 second of
I am in process of checking 220-3 resist on SVG track 2.
PLease report any problems or comments you have on Coral that will be
very helpful to all of us.
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