up date

Mahnaz Mansourpour mahnaz at snf.stanford.edu
Mon Nov 3 16:58:12 PST 2003


Hello all,

I like to report that Mike and Mario had spend a lot of time on the
track 2  to fix the non uniformity.
I checked the 1 um process and the thickness (1 um) across the wafers is
180A difference. I exposed the wafers on KS2 and 1 Um was resolved with
Vacuum contact and 1.2 second of exposure and of course 60 second of
PEB.
I am in process of checking 220-3 resist on SVG track 2.

PLease report any problems or comments you have  on Coral that will be
very helpful to all of us.

mahnaz




More information about the svgcoat2 mailing list