From pnataraj at kovio.com  Mon Feb 16 11:50:05 2004
From: pnataraj at kovio.com (Pradeep K. Nataraj)
Date: Mon, 16 Feb 2004 11:50:05 -0800
Subject: Photoresist as dielectric layer?
Message-ID: <17AB8DED04002F4E803EE9A3E29ECFA80C9BAE@koviomail.print-this.com>

Dear users,
 
I am trying to figure out if any one of you has experience using
photoresist (AZ3612/SPR220) as gate dielectric?
 
I am trying to probe(C-V) the oxide layer (I don't want just to put Al
or any metal and probe through it). 
I would like to use photoresist as protective/dielectric layer between
the metal and oxide layer.
 
I would appreciate for sharing any knowledge regarding this matter.
 
Thank you for your time.
 
Pradeep.
 
 
 
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