From Spotworthy at aol.com  Mon Jan 26 09:53:16 2004
From: Spotworthy at aol.com (Spotworthy at aol.com)
Date: Mon, 26 Jan 2004 12:53:16 -0500
Subject: 220-3 thickness measurements
Message-ID: <40B179FC.6940C236.0CEC25E7@aol.com>

On 1/22/04 I coated 14 wafers with 220-3 resist program 3 6000 rpm.
No hot plate bake, instead oven baked horizontal 30 min at 110C.
thickness as follows (nanospec) values in angstroms

Wafer 1 C = 19559 L = 19559 R = 19603 T = 19631 B = 19479
Wafer 7 C = 19642 L = 19629 R = 19617 T = 19655 B = 19626
Wafer 14 C = 19733 L = 19738 R = 19750 T = 19750 B = 19743

Linda W.