7 and 3 um down
mahnaz at stanford.edu
Fri Mar 10 14:18:27 PST 2006
I need to apologize for this before even writing about it.
We need to take the controller that controls the 7 and 3 um resist out
in order to check the pump for 7 um (Both runs with the same
controller). So over the weekend we will not have capability of running
220-7 on SVGcoat and 220-3 on SVGcoat2. I have been told we will get
the pump and controller back on Monday morning.
More information about the svgcoat2