7 and 3 um down

Mahnaz Mansourpour mahnaz at stanford.edu
Fri Mar 10 14:18:27 PST 2006

Hello all,

I need to apologize for this before even writing about it.

We need to take the controller that controls the 7 and 3 um resist out 
in order to check the pump for 7 um (Both runs with the same 
controller). So over the weekend we will not have capability of running  
220-7 on  SVGcoat and 220-3 on SVGcoat2. I have been told we will get 
the pump and controller back on Monday morning.


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