From mahnaz at stanford.edu Mon Nov 6 16:18:24 2006 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Mon, 06 Nov 2006 16:18:24 -0800 Subject: up date Message-ID: <454FD0D0.1020109@stanford.edu> Hello all, I like to thank you all of you for your patience and understanding. Here is what we have done on both system. SVGtcoat: The issue with particles in the center of the wafers are resolved, the back EBR had not work for a while that problem has been resolved and . We have adjusted the air presser so when you notice something different it is critical to note that. All the programs are up and thickness has been checked today by Uija. We are still facing some intermittent problem as I have had a perfect uniformity for 1 um and 1.6 um on Friday. This morning the uniformity was bad and suck back was totally out of order; all of these has been corrected and I need to ask you all please do not adjust the settings. I had send out a note on FRiday and put a note on the system that due to some problems please DO NOT RUN program 2, some one did and ... Please read notes that intended to communicate with you. SVGcoat2: I did not send out an email on Friday because the coral would have error out and most likely no one would have gotten the email any way, John has fixed the problem and we can comment on the system. Mario has centered the chuck and adjusted the suck back and dispense rate. We still see intermittent problems and flaky switches that few of you have reported after the fix over the weekend. Most programs are tested and looks ok. Intermittent problems are hard to deal with especially with sensitive equipment like SVG that there are many little things to adjust so let Coral and mario and I know what is wrong and we will look into it. Jim Haydon has been helping out with the tracks a thank you note is much appreciated. Parts: We have ordered spare valve, vacuum switches and 3 way drain valve for front EBR. As soon as we get these parts we will install them and hopefully we will get some permanent relief. Please forward your suggestion to me or Mary. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: