SVgtrack2

Mahnaz Mansourpour mahnaz at stanford.edu
Thu Jan 4 16:53:19 PST 2007


  Svgtrack2 is up


    Arm stepper motor has been replaced. Indexer motor has  been replaced.

HMDS and hot plate belts were adjusted and also wafer centering has been 
corrected.

I checked

3612 1 um

10236  10202  10211  10198  10224

3612 1.6 um

16920  16950  16930  16948  16927

220-3 um

30563  30711  30353  30335  30402

I will check the 3617m tomorrow .

The FSE will be back tomorrow to work on the front track.

mahnaz

 


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