From mahnaz at stanford.edu  Mon Jun 11 14:37:24 2007
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Mon, 11 Jun 2007 14:37:24 -0700
Subject: HMDS update
Message-ID: <466DC094.3060801@stanford.edu>


Hello all,

We tested both SVG tracks for  HMDS contact angle measurement
We ran oxide ( 1000A)  wafers  and wafers with Al ( 1000A)  from Metalica.
Due to limited amount of oxide and Al  wafers we had,  we only tested 
recipe 7 on svgcoat vs
recipe1( regular prime recipe) on svgcoat2. On svgcoat  recipe  7  runs 
for two cycles of  25 seconds. At the moment  we are not able to create 
longer HMDS program on the Svgcoat2 due to some mechanical restriction 
from the track.  All the wafers regardless of the contact angle did not 
show any sign of lifting, we used the EV aligner for exposure and 
checked for 1 um line and space and larger.
All of this would reflect on the documentation within few weeks as we 
 are busy with training REUs students. I will make a copy of this sheet 
and post it in the red binder next to tracks. I still want to do some 
more testing as soon as I get more wafers but everything seems to look 
good with either program.


Prime  Recipe  7

Operation             time
Bake                     10.0
*Prime                    25.0*
Bake                     10.0
*Prime                    25.0*
Bake                     10.0
Cool                     5.0
END


Result:
Sample    Contact angle
#1, 1000 Ang. oxide, track 1    60.7
#2, 1000 Ang. oxide, track 1    50.25
#3, 1000 Ang. oxide, track 1    64.15
   
#4, 1000 Ang. Al, track 1    34.61
#5, 1000 Ang. Al, track 1    50.94
   
#6, 1000 Ang. oxide, track 2    29.36
#7, 1000 Ang. oxide, track 2    30.67
   
#8, 1000 Ang. Al, track 2    31.44
#9, 1000 Ang. Al, track 2    49.64

We measured #4 in at least 10 spots and not sure how to explain it, I 
choose not to eliminate that from data.
I like to take this opportunity and thank Jason parker who helped with 
the all these tests.

Mahnaz