From mahnaz at stanford.edu Wed Apr 1 13:57:14 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 01 Apr 2009 13:57:14 -0700 Subject: new shield Message-ID: <49D3D52A.2040008@stanford.edu> Hello all, We just replaced the front shield on the coaters encloser; is very nice. Can we try to keep it nice and clean as much as possible. Many thanks to Jim, Gary and Mario. mahnaz From mahnaz at stanford.edu Thu Apr 2 15:28:14 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 02 Apr 2009 15:28:14 -0700 Subject: perfect 3 UM Message-ID: <49D53BFE.9090507@stanford.edu> I checked the 3 um is perfect. very uniform and no spin boat, perfect EBR and No ebr back splash. The back of wafer very clean. Thickness check 302oo,30060,30050,30158,30207. Thanks Mario mahnaz