From mahnaz at stanford.edu Mon Jan 5 22:18:32 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Mon, 05 Jan 2009 22:18:32 -0800 Subject: changes Message-ID: <4962F7B8.1010507@stanford.edu> Hello all Please note that the *I line resist Shipley 955 has been moved from svgcoat to svgcoat 2,* in hope of eliminating the residue and particles that caused by 220-7 resist when many user did not need the EBR. *Resist 3617 m for glass and quartz has been moved to front track* ( had no where else to Go but front track). We have updated all the documentation for all the changes ( thanks to Uli) please take a few minutes and familiar yourself to changes. mahnaz From mahnaz at stanford.edu Fri Jan 9 11:02:56 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 09 Jan 2009 11:02:56 -0800 Subject: 220-3 Message-ID: <49679F60.7070604@stanford.edu> hello all, My apologize for this not being flagged on the system. 220-3 is down. the controller is out for repair. mahnaz From mahnaz at stanford.edu Wed Jan 14 16:47:14 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 14 Jan 2009 16:47:14 -0800 Subject: 7 and 3 um Message-ID: <496E8792.2050808@stanford.edu> Hello all, All I know that we have not received the controller back if is any consolation I am hurting as well. I have told all of you as soon as the part is here and the process is working, I will send an email out. Few of you voiced frustration, I truly apologize for your time lost. I promise next time around this will not happen. mahnaz From mahnaz at stanford.edu Thu Jan 15 16:28:02 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 15 Jan 2009 16:28:02 -0800 Subject: 220-3 Message-ID: <496FD492.8000200@stanford.edu> Hello all, Farid was kind enough to send me the data he collected on 220-3 on headway today, in case you like to run the resist on headway here it is.... Hello Mahnaz, Here's 3-4 um resist (SPR220-3) test thickness at Headway. RPM Thickness Bake 3000 2.7 um 200 sec hot plate 90C 2000 3.2 um 200 sec hot plate 90C 1600 3.7 um 200 sec hot plate 90C Regards, Farid Zuberi