220-3

Mahnaz Mansourpour mahnaz at stanford.edu
Thu Jan 15 16:28:02 PST 2009


Hello all,

Farid was kind enough to send me the data he collected on 220-3 on 
headway today, in case you like to run the resist on headway here it is....

Hello Mahnaz,

Here's 3-4 um resist (SPR220-3) test thickness at Headway.

RPM        Thickness         Bake
3000          2.7 um           200 sec hot plate 90C
2000          3.2 um            200 sec hot plate 90C
1600          3.7 um           200 sec hot plate 90C

Regards,

Farid Zuberi






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