From mahnaz at stanford.edu  Mon Oct 25 16:15:14 2010
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Mon, 25 Oct 2010 16:15:14 -0700
Subject: 3612
Message-ID: <4CC60F82.3070606@stanford.edu>


Hi All,

Some one had mentioned that there was an issue with 3612 on track 2. 
This morning we ran the system the wafer was right on the thickness spec 
and uniformity looked great. So please when there is an alarm attend to it.
Turning it off and keep running the bottle empty will not result 
anything good and shuts other stuff on the track like the EBR and the 
sender and receiver.

Litho team