3612

Mahnaz Mansourpour mahnaz at stanford.edu
Mon Oct 25 16:15:14 PDT 2010


Hi All,

Some one had mentioned that there was an issue with 3612 on track 2. 
This morning we ran the system the wafer was right on the thickness spec 
and uniformity looked great. So please when there is an alarm attend to it.
Turning it off and keep running the bottle empty will not result 
anything good and shuts other stuff on the track like the EBR and the 
sender and receiver.

Litho team



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