From crozier at snf.stanford.edu Fri Aug 3 12:45:45 2001 From: crozier at snf.stanford.edu (crozier at snf.stanford.edu) Date: Aug 3, 2001 12:45:45 PM Subject: Problem svgdev 2001-08-03 12:45:43: Message-ID: developer on backside of wafer - intermittent problem From vilanova at snf.stanford.edu Mon Aug 6 08:11:30 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 6, 2001 8:11:30 AM Subject: Problem svgdev 2001-08-03 12:45:43: Developer Added to Canister Message-ID: Developer Added to Canister , Ok to use. From njensen at snf.stanford.edu Mon Aug 6 11:31:38 2001 From: njensen at snf.stanford.edu (njensen at snf.stanford.edu) Date: Aug 6, 2001 11:31:38 AM Subject: Problem svgdev 2001-08-06 11:31:36: svgdev Message-ID: Wafers are getting stuck going into the developer tub. The vacuum gets turned on, but the platform doen't lower the wafer into the tub. From martinez at snf.stanford.edu Mon Aug 6 09:46:50 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 6, 2001 9:46:50 PM Subject: Problem svgdev 2001-08-06 11:31:36: svgdev Message-ID: replaced cassette present switch. ready for use. From hopcroft at snf.stanford.edu Mon Aug 6 10:39:57 2001 From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu) Date: Aug 6, 2001 10:39:57 PM Subject: Problem svgdev 2001-08-06 22:39:56: broken wafer in spinner Message-ID: Broken wafer in spinner. Dev track still operational. From vilanova at snf.stanford.edu Tue Aug 7 09:17:14 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 7, 2001 9:17:14 AM Subject: Problem svgdev 2001-08-06 22:39:56: broken wafer in spinner Message-ID: Weekly maintenance performed,Cleaned Bowl, tested it, Working ok, Ready to use.