From mbadi at snf.stanford.edu  Sat Feb 17 08:17:47 2001
From: mbadi at snf.stanford.edu (mbadi at snf.stanford.edu)
Date: Feb 17, 2001 8:17:47 PM
Subject: Problem svgdev 2001-02-17 20:17:46: The sensor on the spinner is out of whack: when  a wafer gets onto the spinner chuck, the system does not detect it and thus developer never gets onto the wafer.
Message-ID: <mailman.27.1357938750.25901.svgdev-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Tue Feb 20 08:29:15 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Feb 20, 2001 8:29:15 AM
Subject: Problem svgdev 2001-02-17 20:17:46: The sensor on the spinner is out of whack: when  a wafer gets onto the spinner chuck, the system does not detect it and thus developer never gets onto the wafer.
Message-ID: <mailman.28.1357938750.25901.svgdev-pcs@snf.stanford.edu>

System Tested No Problem Found, Ok to use