From lgx at snf.stanford.edu  Sun Mar 25 05:33:35 2001
From: lgx at snf.stanford.edu (lgx at snf.stanford.edu)
Date: Mar 25, 2001 5:33:35 PM
Subject: Problem svgdev 2001-03-25 17:33:33: Auto mode fails
Message-ID: <mailman.29.1357938750.25901.svgdev-pcs@snf.stanford.edu>

Wafers cannot be transferred.



From vilanova at snf.stanford.edu  Mon Mar 26 07:01:08 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mar 26, 2001 7:01:08 AM
Subject: Problem svgdev 2001-03-25 17:33:33: Auto mode Ok, User Error
Message-ID: <mailman.30.1357938750.25901.svgdev-pcs@snf.stanford.edu>

Auto Mode Working Ok, User Error , Ok to use



From hansen at snf.stanford.edu  Thu Mar 29 05:17:59 2001
From: hansen at snf.stanford.edu (hansen at snf.stanford.edu)
Date: Mar 29, 2001 5:17:59 PM
Subject: Problem svgdev 2001-03-29 17:17:56: vacuum chuck not sensing wafer always
Message-ID: <mailman.31.1357938750.25901.svgdev-pcs@snf.stanford.edu>

On the develop station at svgdev, the vacuum chuck does not always sense that there is a wafer ready.  Sometimes I have to tip the wafer slightly with the tweezer before the chuck pulls it down and begins developing. 



From vilanova at snf.stanford.edu  Fri Mar 30 07:59:25 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mar 30, 2001 7:59:25 AM
Subject: Problem svgdev 2001-03-29 17:17:56: tested , No problem found ,ok to use
Message-ID: <mailman.32.1357938750.25901.svgdev-pcs@snf.stanford.edu>

tested, NO problem found, I ran Several wafers and there's nothing wrong with the chuck. ready to use.