From suzanne at snf.stanford.edu  Wed May 16 12:59:02 2001
From: suzanne at snf.stanford.edu (suzanne at snf.stanford.edu)
Date: May 16, 2001 12:59:02 PM
Subject: Problem svgdev 2001-05-16 12:59:01: svg2
Message-ID: <mailman.35.1357938750.25901.svgdev-pcs@snf.stanford.edu>

have to use manually..wafer will not move out of cassette



From balaji at snf.stanford.edu  Wed May 16 05:54:52 2001
From: balaji at snf.stanford.edu (balaji at snf.stanford.edu)
Date: May 16, 2001 5:54:52 PM
Subject: Problem svgdev 2001-05-16 17:54:51: chuck not centered while spinning
Message-ID: <mailman.36.1357938750.25901.svgdev-pcs@snf.stanford.edu>




From mahnaz at snf.stanford.edu  Thu May 17 10:22:07 2001
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: May 17, 2001 10:22:07 AM
Subject: Problem svgdev 2001-05-16 17:54:51: chuck not centered while spinning
Message-ID: <mailman.37.1357938750.25901.svgdev-pcs@snf.stanford.edu>

cleaned and reset teh system.



From martinez at snf.stanford.edu  Thu May 17 06:16:02 2001
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: May 17, 2001 6:16:02 PM
Subject: Problem svgdev 2001-05-16 12:59:01: svg2
Message-ID: <mailman.38.1357938750.25901.svgdev-pcs@snf.stanford.edu>

aligned wafer centering tabs, cycled wafers. ready for use.