From ivano at snf.stanford.edu Mon Aug 5 08:37:01 2002 From: ivano at snf.stanford.edu (ivano at snf.stanford.edu) Date: Aug 5, 2002 8:37:01 PM Subject: Problem svgdev 2002-08-05 20:37:00: NO DEVELOPER Message-ID: no developer on track 1 From vilanova at snf.stanford.edu Tue Aug 6 07:39:05 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 6, 2002 7:39:05 AM Subject: Problem svgdev 2002-08-05 20:37:00: NO DEVELOPER Message-ID: Refilled developer tank. From yyao at snf.stanford.edu Mon Aug 12 09:11:35 2002 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Aug 12, 2002 9:11:35 AM Subject: Problem svgdev 2002-08-12 09:11:33: liquid doesn't wet the whole wafer. Message-ID: From martinez at snf.stanford.edu Mon Aug 12 01:25:34 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 12, 2002 1:25:34 PM Subject: Shutdown svgdev 2002-08-12 13:25:33: wpm Message-ID: From martinez at snf.stanford.edu Mon Aug 12 02:31:57 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 12, 2002 2:31:57 PM Subject: Shutdown svgdev 2002-08-12 13:25:33: wpm Message-ID: weekly pm completed From martinez at snf.stanford.edu Mon Aug 12 02:32:57 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 12, 2002 2:32:57 PM Subject: Problem svgdev 2002-08-12 09:11:33: liquid doesn't wet the whole wafer. Message-ID: completed weekly pm, cycled test wafers. dev flow is on the money From wittbrod at snf.stanford.edu Sun Aug 18 06:17:58 2002 From: wittbrod at snf.stanford.edu (wittbrod at snf.stanford.edu) Date: Aug 18, 2002 6:17:58 PM Subject: Problem svgdev 2002-08-18 18:17:56: dummy wafer remains in developer after prog 6 cycle is completed Message-ID: From vilanova at snf.stanford.edu Mon Aug 19 08:05:11 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 19, 2002 8:05:11 AM Subject: Problem svgdev 2002-08-18 18:17:56: dummy wafer remains in developer after prog 6 cycle is completed Message-ID: Please if you make any changes to the programs dont forget to change them back so the next user will not have any problems with it, Found Program 6 changed. Reprogramed all steps , tested ok , ready to use. :-) From martinez at snf.stanford.edu Fri Aug 30 09:55:17 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 30, 2002 9:55:17 AM Subject: Shutdown svgdev 2002-08-30 09:55:16: wpm Message-ID: From martinez at snf.stanford.edu Fri Aug 30 10:45:29 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 30, 2002 10:45:29 AM Subject: Shutdown svgdev 2002-08-30 09:55:16: wpm Message-ID: weekly pm done. ready for use