From eadens at snf.stanford.edu Mon Jul 1 09:38:06 2002 From: eadens at snf.stanford.edu (eadens at snf.stanford.edu) Date: Jul 1, 2002 9:38:06 AM Subject: Problem svgdev 2002-07-01 09:38:05: Wafer stop at bake station Message-ID: After the wafer is baked. It stop at the station wo been transported into the cassette. From martinez at snf.stanford.edu Mon Jul 1 01:54:05 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 1, 2002 1:54:05 PM Subject: Problem svgdev 2002-07-01 09:38:05: Wafer stop at bake station Message-ID: process sequence disrupted. reset system, cycled wafers From martinez at snf.stanford.edu Wed Jul 3 09:19:58 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 3, 2002 9:19:58 AM Subject: Shutdown svgdev 2002-07-03 09:19:57: wpm Message-ID: From martinez at snf.stanford.edu Wed Jul 3 10:19:34 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 3, 2002 10:19:34 AM Subject: Shutdown svgdev 2002-07-03 09:19:57: wpm Message-ID: weekly pm done From vilanova at snf.stanford.edu Tue Jul 9 06:19:27 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 9, 2002 6:19:27 AM Subject: Shutdown svgdev 2002-07-09 06:19:26: exhaust maintenance Message-ID: From vilanova at snf.stanford.edu Tue Jul 9 08:27:43 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 9, 2002 8:27:43 AM Subject: Shutdown svgdev 2002-07-09 06:19:26: exhaust maintenance Message-ID: Maintenance Completed From martinez at snf.stanford.edu Tue Jul 9 09:37:18 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 9, 2002 9:37:18 AM Subject: Shutdown svgdev 2002-07-09 09:37:17: wpm Message-ID: From martinez at snf.stanford.edu Tue Jul 9 10:58:13 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 9, 2002 10:58:13 AM Subject: Shutdown svgdev 2002-07-09 09:37:17: wpm Message-ID: weekly pm done From xiangli at snf.stanford.edu Thu Jul 11 10:37:53 2002 From: xiangli at snf.stanford.edu (xiangli at snf.stanford.edu) Date: Jul 11, 2002 10:37:53 PM Subject: Problem svgdev 2002-07-11 22:37:50: Track problem Message-ID: The wafter stalked on the track from the developer to the oeven causing two wafters pileing up. One wafer is broken in the delveloper From vilanova at snf.stanford.edu Fri Jul 12 08:14:46 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 12, 2002 8:14:46 AM Subject: Problem svgdev 2002-07-11 22:37:50: Track problem Message-ID: removed broken wafer, cleaned catch cup , replaced missing track belt, tested , working ok , Ready to use. :-) From ferrera at snf.stanford.edu Sun Jul 14 06:20:35 2002 From: ferrera at snf.stanford.edu (ferrera at snf.stanford.edu) Date: Jul 14, 2002 6:20:35 PM Subject: Problem svgdev 2002-07-14 18:20:35: Prob. w/ dbl side polished wafers Message-ID: Spinner has problems releasing double-side-polished wafers after development step is complete. From vilanova at snf.stanford.edu Mon Jul 15 08:03:08 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 15, 2002 8:03:08 AM Subject: Problem svgdev 2002-07-14 18:20:35: Prob. w/ dbl side polished wafers Message-ID: I checked all sensors and Ran doble polished wafers and it worked ok, please do not change the time or anything to the programs that you are not supossed to. From davehong at snf.stanford.edu Mon Jul 15 11:27:09 2002 From: davehong at snf.stanford.edu (davehong at snf.stanford.edu) Date: Jul 15, 2002 11:27:09 AM Subject: Problem svgdev 2002-07-15 11:27:08: track sensor problem Message-ID: after wafer bake and wafer has been moved to the receiving wafer boat, the hot plate track is still running and does not stop From vilanova at snf.stanford.edu Mon Jul 15 01:46:29 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 15, 2002 1:46:29 PM Subject: Problem svgdev 2002-07-15 11:27:08: track sensor problem Message-ID: adjusted receive indexer screw From vilanova at snf.stanford.edu Mon Jul 15 01:46:34 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 15, 2002 1:46:34 PM Subject: Problem svgdev 2002-07-15 11:27:08: track sensor problem Message-ID: adjusted receive indexer screw From vilanova at snf.stanford.edu Thu Jul 18 10:22:23 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 18, 2002 10:22:23 AM Subject: Shutdown svgdev 2002-07-18 10:22:22: weekly Pm in progress Message-ID: From vilanova at snf.stanford.edu Thu Jul 18 11:31:58 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 18, 2002 11:31:58 AM Subject: Shutdown svgdev 2002-07-18 10:22:22: weekly Pm in progress Message-ID: Weekly Pm Completed From rgrow at snf.stanford.edu Sun Jul 21 10:44:25 2002 From: rgrow at snf.stanford.edu (rgrow at snf.stanford.edu) Date: Jul 21, 2002 10:44:25 AM Subject: Problem svgdev 2002-07-21 10:44:24: "on" light on despite not being enabled Message-ID: From rgrow at snf.stanford.edu Sun Jul 21 10:49:09 2002 From: rgrow at snf.stanford.edu (rgrow at snf.stanford.edu) Date: Jul 21, 2002 10:49:09 AM Subject: Problem svgdev 2002-07-21 10:49:08: cleared up "on" light problem Message-ID: I enabled and disabled, and then the light went off. From vilanova at snf.stanford.edu Mon Jul 22 07:28:19 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 22, 2002 7:28:19 AM Subject: Problem svgdev 2002-07-21 10:44:24: "on" light on despite not being enabled Message-ID: Coral Problem Cleared, ready to use. From vilanova at snf.stanford.edu Mon Jul 22 07:28:53 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 22, 2002 7:28:53 AM Subject: Problem svgdev 2002-07-21 10:49:08: cleared up "on" light problem Message-ID: cleared up coral problem. From erics at snf.stanford.edu Thu Jul 25 09:49:39 2002 From: erics at snf.stanford.edu (erics at snf.stanford.edu) Date: Jul 25, 2002 9:49:39 PM Subject: Comment svgdev 2002-07-25 21:49:38: splash on wafers Message-ID: I noticed that when the spinner goes into high rotation with developer on the wafer some developer gets squirted onto the top wafer that is in the load cassette From balaji at snf.stanford.edu Mon Jul 29 04:07:55 2002 From: balaji at snf.stanford.edu (balaji at snf.stanford.edu) Date: Jul 29, 2002 4:07:55 PM Subject: Problem svgdev 2002-07-29 16:07:54: does not enable Message-ID: svgcoat shows 'enabled' status on coral but does not actually enable the machine ... From vilanova at snf.stanford.edu Tue Jul 30 07:31:58 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 30, 2002 7:31:58 AM Subject: Problem svgdev 2002-07-29 16:07:54: does not enable Message-ID: Coral system is working fine, couldnt repeat the problem Ok to use. :-)