From jdas at snf.stanford.edu Wed May 1 01:10:00 2002 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: May 1, 2002 1:10:00 PM Subject: Problem svgdev 2002-05-01 13:09:59: bake prog 2 is not working Message-ID: From vilanova at snf.stanford.edu Thu May 2 07:36:58 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 2, 2002 7:36:58 AM Subject: Problem svgdev 2002-05-01 13:09:59: bake prog 2 is not working Message-ID: Bake program working ok, IF you change the programs in any of the developer or coaters machine please remember to put them back the way they were. Ok to use From arnold at snf.stanford.edu Thu May 2 05:53:06 2002 From: arnold at snf.stanford.edu (arnold at snf.stanford.edu) Date: May 2, 2002 5:53:06 PM Subject: Shutdown svgdev 2002-05-02 17:53:04: shutdown broken wafer Message-ID: Broken wafer in svgdev From martinez at snf.stanford.edu Fri May 3 08:18:40 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 3, 2002 8:18:40 AM Subject: Shutdown svgdev 2002-05-02 17:53:04: shutdown broken wafer Message-ID: cleaned up broken wafer bits, cycled wafers. From martinez at snf.stanford.edu Fri May 10 07:49:14 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 10, 2002 7:49:14 AM Subject: Shutdown svgdev 2002-05-10 07:49:13: WPM Message-ID: From martinez at snf.stanford.edu Fri May 10 08:45:30 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 10, 2002 8:45:30 AM Subject: Shutdown svgdev 2002-05-10 07:49:13: WPM Message-ID: weekly pm completed.