From martinez at snf.stanford.edu Tue Nov 5 09:32:15 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Nov 5, 2002 9:32:15 AM Subject: Shutdown svgdev 2002-11-05 09:32:14: wpm Message-ID: From martinez at snf.stanford.edu Tue Nov 5 10:17:16 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Nov 5, 2002 10:17:16 AM Subject: Shutdown svgdev 2002-11-05 09:32:14: wpm Message-ID: weekly pm completed From quickwin at snf.stanford.edu Fri Nov 15 05:28:20 2002 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Nov 15, 2002 5:28:20 PM Subject: Problem svgdev 2002-11-15 17:28:19: sender cassette problem Message-ID: The machine got into problem on my fifth wafer in the cassette. It can not send the fifth wafer correctly (first four wafers were OK). From vilanova at snf.stanford.edu Mon Nov 18 07:48:52 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 18, 2002 7:48:52 AM Subject: Problem svgdev 2002-11-15 17:28:19: sender cassette problem Message-ID: I've run 20 wafers and I couldn't repeat the problem . Ok to use From vilanova at snf.stanford.edu Wed Nov 20 07:44:05 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 20, 2002 7:44:05 AM Subject: Shutdown svgdev 2002-11-20 07:44:05: Preventive Maintenance Message-ID: Weekly maintenance in progress............... From vilanova at snf.stanford.edu Wed Nov 20 08:19:30 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 20, 2002 8:19:30 AM Subject: Shutdown svgdev 2002-11-20 07:44:05: Preventive Maintenance Message-ID: Weekly Maintenance Completed . From mbartsch at snf.stanford.edu Wed Nov 20 08:33:07 2002 From: mbartsch at snf.stanford.edu (mbartsch at snf.stanford.edu) Date: Nov 20, 2002 8:33:07 PM Subject: Problem svgdev 2002-11-20 20:33:06: Bake didn't END as requested Message-ID: I ran a program for developing thick resist on one side of the wafer while the backside was coated with resist as well. Normally, you run dev program 6 and a program with END as its first action for the bake stage. This time, however, running an END bake caused the bake stage to lower the wafer down onto the hot plate for a second before lifitng it back up and bypassing the stage. What is that all about?!? Needless to say, there was cooked resist everywhere... I've never seen the developer pull this trick before. Very annoying. From vilanova at snf.stanford.edu Thu Nov 21 07:57:55 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 21, 2002 7:57:55 AM Subject: Problem svgdev 2002-11-20 20:33:06: Bake didn't END as requested Message-ID: Please check the programs before you run them , Sometimes even if you put it at end the rail will go down if there is a secondleft on the time, so you better make sure all the programs are correct. Ok to use .