From vilanova at snf.stanford.edu Fri Oct 4 10:27:17 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 4, 2002 10:27:17 AM Subject: Shutdown svgdev 2002-10-04 10:27:17: Weekly Pm Message-ID: From vilanova at snf.stanford.edu Fri Oct 4 10:59:01 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 4, 2002 10:59:01 AM Subject: Shutdown svgdev 2002-10-04 10:27:17: Weekly Pm Message-ID: Weekly Pm Completed From vilanova at snf.stanford.edu Tue Oct 15 07:35:09 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 15, 2002 7:35:09 AM Subject: Shutdown svgdev 2002-10-15 07:35:08: Weekly PM Message-ID: From vilanova at snf.stanford.edu Tue Oct 15 08:19:25 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 15, 2002 8:19:25 AM Subject: Shutdown svgdev 2002-10-15 07:35:08: Weekly PM Message-ID: Weekly PM Completed From peter at snf.stanford.edu Tue Oct 15 04:53:59 2002 From: peter at snf.stanford.edu (peter at snf.stanford.edu) Date: Oct 15, 2002 4:53:59 PM Subject: Problem svgdev 2002-10-15 16:53:58: error message Message-ID: From vilanova at snf.stanford.edu Wed Oct 16 07:47:17 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 16, 2002 7:47:17 AM Subject: Problem svgdev 2002-10-15 16:53:58: error message Message-ID: Operator error,Tested , Track working fine Ready to use . From wliu at snf.stanford.edu Tue Oct 22 02:48:39 2002 From: wliu at snf.stanford.edu (wliu at snf.stanford.edu) Date: Oct 22, 2002 2:48:39 AM Subject: Problem svgdev 2002-10-22 02:48:36: track badly scratched back of wafers Message-ID: during transition from dev to bake, deep scratches/scrapes occurred on backside of wafers! From vilanova at snf.stanford.edu Tue Oct 22 07:35:39 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 22, 2002 7:35:39 AM Subject: Problem svgdev 2002-10-22 02:48:36: track badly scratched back of wafers Message-ID: Ran Several Wafers, couldnt find any scratches. Systems is running Good . Ok to use From martinez at snf.stanford.edu Tue Oct 22 02:27:54 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 22, 2002 2:27:54 PM Subject: Shutdown svgdev 2002-10-22 14:27:54: wpm Message-ID: From martinez at snf.stanford.edu Tue Oct 22 03:05:29 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 22, 2002 3:05:29 PM Subject: Shutdown svgdev 2002-10-22 14:27:54: wpm Message-ID: weekly pm done From cbellew at snf.stanford.edu Tue Oct 29 09:43:46 2002 From: cbellew at snf.stanford.edu (cbellew at snf.stanford.edu) Date: Oct 29, 2002 9:43:46 AM Subject: Shutdown svgdev 2002-10-29 09:43:45: Broken wafer in developer Message-ID: A dummy wafer was off center of the chuck and broke when it began to spin. From vilanova at snf.stanford.edu Tue Oct 29 10:57:06 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 29, 2002 10:57:06 AM Subject: Shutdown svgdev 2002-10-29 09:43:45: Broken wafer in developer Message-ID: removed broken wafer cleaned catch cup chuck, lubricated tracks, tested, Ok to use From quickwin at snf.stanford.edu Wed Oct 30 12:07:48 2002 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Oct 30, 2002 12:07:48 PM Subject: Problem svgdev 2002-10-30 12:07:47: short hose below the sender cassette causes problem Message-ID: It prevents even the third wafer from being accessed. From vilanova at snf.stanford.edu Wed Oct 30 02:02:32 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 30, 2002 2:02:32 PM Subject: Problem svgdev 2002-10-30 12:07:47: short hose below the sender cassette causes problem Message-ID: sender Indexer checked , and we couldnt repeat the problem Working ok, ready to use . From daesung at snf.stanford.edu Wed Oct 30 03:48:31 2002 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Oct 30, 2002 3:48:31 PM Subject: Problem svgdev 2002-10-30 15:48:29: Vacuum breaks Message-ID: From martinez at snf.stanford.edu Wed Oct 30 04:29:09 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 30, 2002 4:29:09 PM Subject: Problem svgdev 2002-10-30 15:48:29: Vacuum breaks Message-ID: cycled test wafers no ,problem found From martinez at snf.stanford.edu Thu Oct 31 01:44:19 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 31, 2002 1:44:19 PM Subject: Shutdown svgdev 2002-10-31 13:44:18: WPM Message-ID: From martinez at snf.stanford.edu Thu Oct 31 01:45:36 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 31, 2002 1:45:36 PM Subject: Shutdown svgdev 2002-10-31 13:44:18: WPM Message-ID: wrong track