From jqguo at snf.stanford.edu Wed Apr 2 04:23:21 2003 From: jqguo at snf.stanford.edu (jqguo at snf.stanford.edu) Date: Apr 2, 2003 4:23:21 PM Subject: Problem svgdev 2003-04-02 16:23:21: Report Problem for svgdev Message-ID: one wafer was broken in the developer tank, most broken pieces were taken out but still some left. After the incident, a dummie wafer was runned through OK. From vilanova at snf.stanford.edu Thu Apr 3 08:01:19 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Apr 3, 2003 8:01:19 AM Subject: Problem svgdev 2003-04-02 16:23:21: Report Clear for svgdev Message-ID: cleaned up catch cup , cenTered wafer chuck , tested ( ran 15 wafer wih no problems ) Cleaned Hoplate. Ok o use. From gyama at snf.stanford.edu Wed Apr 9 09:53:37 2003 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Apr 9, 2003 9:53:37 AM Subject: Problem svgdev 2003-04-09 09:53:34: Report Problem for svgdev Message-ID: belts not turning in auto mode From charley at snf.stanford.edu Wed Apr 9 04:11:07 2003 From: charley at snf.stanford.edu (charley at snf.stanford.edu) Date: Apr 9, 2003 4:11:07 PM Subject: Problem svgdev 2003-04-09 09:53:34: Report Clear for svgdev Message-ID: Found level sensors OK, continuity through both in series. Saw no voltage to read them from developer, found cable pulled out inside cabinet. OK now From mahnaz at snf.stanford.edu Wed Apr 9 04:21:34 2003 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Apr 9, 2003 4:21:34 PM Subject: Comment svgdev 2003-04-09 16:21:33: Report Comment for svgdev Message-ID: Only can be run in manuall mode. From vilanova at snf.stanford.edu Thu Apr 10 07:32:25 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Apr 10, 2003 7:32:25 AM Subject: Comment svgdev 2003-04-10 07:32:25: Report Comment for svgdev Message-ID: I've fixed the settings on the Indexer now the track works On manual and auto mode. From pindermu at snf.stanford.edu Tue Apr 15 10:31:28 2003 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Apr 15, 2003 10:31:28 PM Subject: Problem svgdev 2003-04-15 22:31:27: Report Problem for svgdev Message-ID: Transfer not working on developer station From pindermu at snf.stanford.edu Tue Apr 15 10:34:14 2003 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Apr 15, 2003 10:34:14 PM Subject: Problem svgdev 2003-04-15 22:34:13: Report Problem for svgdev Message-ID: Please discard previous message, I enabled the wrong track. Sorry! From vilanova at snf.stanford.edu Wed Apr 16 07:09:05 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Apr 16, 2003 7:09:05 AM Subject: Problem svgdev 2003-04-15 22:31:27: Report Clear for svgdev Message-ID: Operator Error , he had the wrong track enabled. From vilanova at snf.stanford.edu Wed Apr 16 07:09:18 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Apr 16, 2003 7:09:18 AM Subject: Problem svgdev 2003-04-15 22:34:13: Report Clear for svgdev Message-ID: Operator Error . From swalker at snf.stanford.edu Wed Apr 30 03:25:18 2003 From: swalker at snf.stanford.edu (swalker at snf.stanford.edu) Date: Apr 30, 2003 3:25:18 PM Subject: Shutdown svgdev 2003-04-30 15:25:17: Report Shutdown for svgdev Message-ID: stage cant hold the wafer with vacuum, so it stucks there without being developed! From martinez at snf.stanford.edu Wed Apr 30 04:41:21 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Apr 30, 2003 4:41:21 PM Subject: Shutdown svgdev 2003-04-30 15:25:17: Report Clear for svgdev Message-ID: adj wafer at catch cup sensor. cycled 4 wafers ready for use From tkato at snf.stanford.edu Wed Apr 30 05:59:37 2003 From: tkato at snf.stanford.edu (tkato at snf.stanford.edu) Date: Apr 30, 2003 5:59:37 PM Subject: Problem svgdev 2003-04-30 17:59:30: svgdev 1 cann't be enable Message-ID: svgdev1 can't be enable. I can see "enable" sign on Coral system but the "ON" light on the machine didn't work.