Problem svgdev 2003-04-02 16:23:21: Report Clear for svgdev

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Apr 3 08:01:19 PST 2003


cleaned  up catch cup , cenTered wafer chuck ,  tested ( ran 15 wafer wih no problems ) Cleaned Hoplate. 
Ok o use. 




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