From davehong at snf.stanford.edu  Thu Feb 20 04:08:32 2003
From: davehong at snf.stanford.edu (davehong at snf.stanford.edu)
Date: Feb 20, 2003 4:08:32 PM
Subject: Problem svgdev 2003-02-20 16:08:31: vacuum chuck won't take wafer
Message-ID: <mailman.200.1357938752.25901.svgdev-pcs@snf.stanford.edu>




From martinez at snf.stanford.edu  Thu Feb 20 04:37:32 2003
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Feb 20, 2003 4:37:32 PM
Subject: Problem svgdev 2003-02-20 16:08:31: vacuum chuck won't take wafer
Message-ID: <mailman.201.1357938752.25901.svgdev-pcs@snf.stanford.edu>

cycled six wafers. could not duplicate problem.



From lindaw at snf.stanford.edu  Mon Feb 24 12:53:23 2003
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Feb 24, 2003 12:53:23 PM
Subject: Problem svgdev 2003-02-24 12:53:22: air leak during develop cycle, loud but runs ok
Message-ID: <mailman.202.1357938752.25901.svgdev-pcs@snf.stanford.edu>

The SVGDEV track seems to have an air leak during the develop cycle.  It runs ok, just makes a horrible hissing racket.



From martinez at snf.stanford.edu  Mon Feb 24 02:46:39 2003
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Feb 24, 2003 2:46:39 PM
Subject: Problem svgdev 2003-02-24 12:53:22: air leak during develop cycle, loud but runs ok
Message-ID: <mailman.203.1357938752.25901.svgdev-pcs@snf.stanford.edu>

replaced leaking air hose.