From yyao at snf.stanford.edu Sun Mar 2 09:34:19 2003 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Mar 2, 2003 9:34:19 PM Subject: Problem svgdev 2003-03-02 21:34:18: can't send wafer Message-ID: From martinez at snf.stanford.edu Mon Mar 3 02:07:24 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mar 3, 2003 2:07:24 PM Subject: Problem svgdev 2003-03-02 21:34:18: Report Clear for svgdev Message-ID: adj send indexer sensitivity, leveled splash guard, cycled wafers From quickwin at snf.stanford.edu Fri Mar 7 02:44:01 2003 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Mar 7, 2003 2:44:01 PM Subject: Problem svgdev 2003-03-07 14:44:00: sensing problem Message-ID: Sender cassette side has difficulty sensing wafers. I have a wafer which was not sensed and it ended up bearing the full weight of the black cassette! It could have broken in half my $1500 wafer! From vilanova at snf.stanford.edu Mon Mar 10 08:09:44 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 10, 2003 8:09:44 AM Subject: Problem svgdev 2003-03-07 14:44:00: Report Clear for svgdev Message-ID: Send Indexer air sensor adjusted, tested , ran 10 wafers running ok, ready to use. From martinez at snf.stanford.edu Tue Mar 18 02:12:16 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mar 18, 2003 2:12:16 PM Subject: Shutdown svgdev 2003-03-18 14:12:16: Report Shutdown for svgdev Message-ID: wpm From mahnaz at snf.stanford.edu Tue Mar 18 02:59:17 2003 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mar 18, 2003 2:59:17 PM Subject: Shutdown svgdev 2003-03-18 14:12:16: Report Clear for svgdev Message-ID: Mike is done with the weekly pm. From cbellew at snf.stanford.edu Mon Mar 24 08:32:23 2003 From: cbellew at snf.stanford.edu (cbellew at snf.stanford.edu) Date: Mar 24, 2003 8:32:23 PM Subject: Problem svgdev 2003-03-24 20:32:17: Wafer broke in developer bowl Message-ID: One of my very special wafers who never hurt a soul in its short life shattered in the developer bowl. From vilanova at snf.stanford.edu Tue Mar 25 08:04:08 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 25, 2003 8:04:08 AM Subject: Problem svgdev 2003-03-24 20:32:17: Report Clear for svgdev Message-ID: removed dead wafer and cleaned catch cup. tested ok, ready to use. From cbellew at snf.stanford.edu Tue Mar 25 11:41:50 2003 From: cbellew at snf.stanford.edu (cbellew at snf.stanford.edu) Date: Mar 25, 2003 11:41:50 AM Subject: Problem svgdev 2003-03-25 11:41:49: Transfer track not retracting completely Message-ID: After the wafer has been transferred to the develop station, the tracks are not sliding smoothly and they don't go all the way back to the rest position. A helping hand is needed. From vilanova at snf.stanford.edu Tue Mar 25 02:24:46 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 25, 2003 2:24:46 PM Subject: Problem svgdev 2003-03-25 11:41:49: Report Clear for svgdev Message-ID: there was an air hose blocking the track from opening all the way out , removed hose out of the way tested ok. ready to use . From cad59 at snf.stanford.edu Mon Mar 31 01:03:01 2003 From: cad59 at snf.stanford.edu (cad59 at snf.stanford.edu) Date: Mar 31, 2003 1:03:01 PM Subject: Problem svgdev 2003-03-31 13:02:56: Report Problem for svgdev Message-ID: jammed. problem with wafers catching to track. tried to clear... From vilanova at snf.stanford.edu Mon Mar 31 01:42:58 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 31, 2003 1:42:58 PM Subject: Problem svgdev 2003-03-31 13:02:56: Report Clear for svgdev Message-ID: I,ve ran several wafers and I couldn't repeat the problem . Ok to use .