Problem svgdev 2003-05-04 18:17:34: Report Clear for svgdev

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon May 5 07:34:37 PDT 2003


The problem with is more related to the resist than to the 
developer track ,because we;ve  increased the developer and
water flow and we get the same result. so I think this is more
related to the chemical (SPR220-7) than to the tracks.




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