From gyama at snf.stanford.edu  Thu Nov 20 10:12:25 2003
From: gyama at snf.stanford.edu (gyama at snf.stanford.edu)
Date: Thu, 20 Nov 2003 10:12:25 -0800
Subject: Problem svgdev 2003-11-20 10:12:24: wafer not going into dev step
Message-ID: <mailman.253.1357938752.25901.svgdev-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Thu Nov 20 14:18:31 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 20 Nov 2003 14:18:31 -0800
Subject: Problem svgdev 2003-11-20 10:12:24: wafer not going into dev step
Message-ID: <mailman.254.1357938752.25901.svgdev-pcs@snf.stanford.edu>

Increased Vacuum flow ,Weekly PM completed,
tested , ready to use.



From ericp at snf.stanford.edu  Tue Nov 25 20:04:26 2003
From: ericp at snf.stanford.edu (ericp at snf.stanford.edu)
Date: Tue, 25 Nov 2003 20:04:26 -0800
Subject: Problem svgdev 2003-11-25 20:04:26: wafer goes on chuck, freezes
Message-ID: <mailman.255.1357938752.25901.svgdev-pcs@snf.stanford.edu>

It's acting like it doesn't sense the vacuum 
withe the wafer present.  Wafer goes into position,
chuck comes up and grabs the wafer, but then stops.



From cbaxter at snf.stanford.edu  Tue Nov 25 22:38:04 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 25 Nov 2003 22:38:04 -0800
Subject: Problem svgdev 2003-11-25 20:04:26: wafer goes on chuck, freezes
Message-ID: <mailman.256.1357938752.25901.svgdev-pcs@snf.stanford.edu>

adjusted vacuum mechanical switch