From sguan at snf.stanford.edu  Tue Sep  9 11:02:01 2003
From: sguan at snf.stanford.edu (sguan at snf.stanford.edu)
Date: Sep 9, 2003 11:02:01 AM
Subject: Problem svgdev 2003-09-09 11:02:00: Report Problem for svgdev
Message-ID: <mailman.243.1357938752.25901.svgdev-pcs@snf.stanford.edu>

wafer sucked on developer chuck



From vilanova at snf.stanford.edu  Tue Sep  9 11:39:37 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sep 9, 2003 11:39:37 AM
Subject: Problem svgdev 2003-09-09 11:02:00: Report Clear for svgdev
Message-ID: <mailman.244.1357938752.25901.svgdev-pcs@snf.stanford.edu>

Wafer removed from chuck , tested , ready to use



From tkato at snf.stanford.edu  Thu Sep 25 11:09:59 2003
From: tkato at snf.stanford.edu (tkato at snf.stanford.edu)
Date: Sep 25, 2003 11:09:59 AM
Subject: Problem svgdev 2003-09-25 11:09:58: Report Problem for svgdev
Message-ID: <mailman.245.1357938752.25901.svgdev-pcs@snf.stanford.edu>

wafer wasn't able to be transfered into Hotplate.
Hight of a metal part of the hotplate looks too high.
 



From martinez at snf.stanford.edu  Mon Sep 29 03:07:47 2003
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Sep 29, 2003 3:07:47 PM
Subject: Problem svgdev 2003-09-25 11:09:58: Report Clear for svgdev
Message-ID: <mailman.246.1357938752.25901.svgdev-pcs@snf.stanford.edu>

found power supply is bad. installed loaner from UTS
cycled test wafers ready for use



From crichter at snf.stanford.edu  Mon Sep 29 07:15:22 2003
From: crichter at snf.stanford.edu (crichter at snf.stanford.edu)
Date: Sep 29, 2003 7:15:22 PM
Subject: Problem svgdev 2003-09-29 19:15:21: developer track does not work
Message-ID: <mailman.247.1357938752.25901.svgdev-pcs@snf.stanford.edu>




From cmfaulkn at snf.stanford.edu  Mon Sep 29 07:30:16 2003
From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu)
Date: Sep 29, 2003 7:30:16 PM
Subject: Problem svgdev 2003-09-29 19:30:15: Report Problem for svgdev
Message-ID: <mailman.248.1357938752.25901.svgdev-pcs@snf.stanford.edu>

wafer transfer on developiing station not moving.  It was enabled.



From martinez at snf.stanford.edu  Tue Sep 30 09:36:04 2003
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Sep 30, 2003 9:36:04 AM
Subject: Problem svgdev 2003-09-29 19:30:15: Report Clear for svgdev
Message-ID: <mailman.249.1357938752.25901.svgdev-pcs@snf.stanford.edu>

replaced  wafer transfer motor for dev module
cycled test wafers.



From martinez at snf.stanford.edu  Tue Sep 30 09:36:46 2003
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Sep 30, 2003 9:36:46 AM
Subject: Problem svgdev 2003-09-29 19:15:21: Report Clear for svgdev
Message-ID: <mailman.250.1357938752.25901.svgdev-pcs@snf.stanford.edu>

replaced wafer transfer motor for dev module
cycled wafers.