From calarrudo at snf.stanford.edu  Fri Jun 18 11:22:39 2004
From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu)
Date: Fri, 18 Jun 2004 11:22:39 -0700
Subject: Problem svgdev 2004-06-18 11:22:30: Droplet on wafer
Message-ID: <mailman.279.1357938753.25901.svgdev-pcs@snf.stanford.edu>

I saw a dropplet of liquid appear on my wafer on the bake chuck.  The droplet dried white.  I see the same type of dried drops 
on the heat chuck and on another wafer I developed the other 
day.  I don't know where the drop came from.  Ceiling or developer.  I was developing another wafer at the time.



From martinez at snf.stanford.edu  Fri Jun 18 11:25:46 2004
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Fri, 18 Jun 2004 11:25:46 -0700
Subject: Problem svgdev 2004-06-18 11:22:30: Droplet on wafer
Message-ID: <mailman.280.1357938753.25901.svgdev-pcs@snf.stanford.edu>

adj dev spray pressure, cycled wafers. good to go