From sjo at snf.stanford.edu Sun Feb 6 20:35:04 2005 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Sun, 6 Feb 2005 20:35:04 -0800 Subject: Problem svgdev SNF 2005-02-06 20:35:03: won't detect wafer Message-ID: I set it up to develop 5 wafers, the first 2 passed fine, but the 3rd and any subsequent ones would run up against the alignment stop, but the bands would keep turning and the wafer wouldn't be taken by the chuck. Also the indexer at the beginning seemed to not detect wafers either from there on - i.e. a new casette would be lowered until it rested on the bottom most wafer. It was all standard Si test wafers. From vilanova at snf.stanford.edu Mon Feb 7 09:05:24 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 7 Feb 2005 09:05:24 -0800 Subject: Problem svgdev SNF 2005-02-06 20:35:03: won't detect wafer Message-ID: canister was empty , that's why the sensors were not working refilled canister , ran several wafers, no problem . ok to use.