Problem svgdev SNF 2005-02-06 20:35:03: won't detect wafer

sjo at snf.stanford.edu sjo at snf.stanford.edu
Sun Feb 6 20:35:04 PST 2005


I set it up to develop 5 wafers, the first 2 passed fine, but the 3rd and any subsequent ones would run up against the alignment stop, but the bands would keep turning and the wafer wouldn't be taken by the chuck. Also the indexer at the beginning seemed to not detect wafers either from there on - i.e. a new casette would be lowered until it rested on the bottom most wafer. It was all standard Si test wafers.




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