From crichter at snf.stanford.edu Thu Jun 2 16:13:42 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 2 Jun 2005 16:13:42 -0700 Subject: Shutdown svgdev SNF 2005-06-02 16:13:41: developer residue on backsides of wafers Message-ID: From martinez at snf.stanford.edu Thu Jun 2 16:31:25 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 2 Jun 2005 16:31:25 -0700 Subject: Shutdown svgdev SNF 2005-06-02 16:13:41: developer residue on backsides of wafers Message-ID: change to problem From martinez at snf.stanford.edu Thu Jun 2 16:32:43 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 2 Jun 2005 16:32:43 -0700 Subject: Problem svgdev SNF 2005-06-02 16:32:42: broken nozzle Message-ID: back side rinse nozzle has been broken off wafers processed on this track must be rinsed in the SRD after dev. From vilanova at snf.stanford.edu Fri Jun 3 10:42:49 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 3 Jun 2005 10:42:49 -0700 Subject: Problem svgdev SNF 2005-06-02 16:32:42: broken nozzle Message-ID: Replaced Broken Noozle, Cycled wafers , ok to use. From martinez at snf.stanford.edu Tue Jun 7 08:49:08 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 7 Jun 2005 08:49:08 -0700 Subject: Shutdown svgdev SNF 2005-06-07 08:49:08: change to cda Message-ID: From martinez at snf.stanford.edu Tue Jun 7 10:10:08 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 7 Jun 2005 10:10:08 -0700 Subject: Shutdown svgdev SNF 2005-06-07 08:49:08: change to cda Message-ID: system pneumatics switched to cda cycled test wafers weekly pm completed From tejask at snf.stanford.edu Sat Jun 11 19:54:35 2005 From: tejask at snf.stanford.edu (tejask at snf.stanford.edu) Date: Sat, 11 Jun 2005 19:54:35 -0700 Subject: Problem svgdev SNF 2005-06-11 19:54:33: alarm: developer fluid low Message-ID: From lxuwind at snf.stanford.edu Sun Jun 12 20:27:55 2005 From: lxuwind at snf.stanford.edu (lxuwind at snf.stanford.edu) Date: Sun, 12 Jun 2005 20:27:55 -0700 Subject: Shutdown svgdev SNF 2005-06-12 20:27:55: transfer not working Message-ID: From vilanova at snf.stanford.edu Mon Jun 13 07:02:13 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 13 Jun 2005 07:02:13 -0700 Subject: Problem svgdev SNF 2005-06-11 19:54:33: alarm: developer fluid low Message-ID: Developer added to canister , cycled wafers , ready to use. From vilanova at snf.stanford.edu Mon Jun 13 07:02:30 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 13 Jun 2005 07:02:30 -0700 Subject: Shutdown svgdev SNF 2005-06-12 20:27:55: transfer not working Message-ID: developer added to canister , cycled wafers, ok to use. From vilanova at snf.stanford.edu Wed Jun 22 09:55:14 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 22 Jun 2005 09:55:14 -0700 Subject: Shutdown svgdev SNF 2005-06-22 09:55:13: Weekly PM In progress..... Message-ID: From vilanova at snf.stanford.edu Wed Jun 22 10:30:07 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 22 Jun 2005 10:30:07 -0700 Subject: Shutdown svgdev SNF 2005-06-22 09:55:13: Weekly PM In progress..... Message-ID: Weekly Pm Completed.