From mahnaz at snf.stanford.edu Fri Aug 4 16:20:12 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 4 Aug 2006 16:20:12 -0700 Subject: Problem svgdev SNF 2006-08-04 16:20:10: caused scrateches on the back of wafers. Message-ID: From me342b at snf.stanford.edu Sat Aug 5 21:28:56 2006 From: me342b at snf.stanford.edu (me342b at snf.stanford.edu) Date: Sat, 5 Aug 2006 21:28:56 -0700 Subject: Comment svgdev SNF 2006-08-05 21:28:55: low on developer Message-ID: From changyol at snf.stanford.edu Mon Aug 7 09:07:40 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Mon, 7 Aug 2006 09:07:40 -0700 Subject: Problem svgdev SNF 2006-08-04 16:20:10: caused scrateches on the back of wafers. Message-ID: cleared. From changyol at snf.stanford.edu Mon Aug 7 09:07:58 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Mon, 7 Aug 2006 09:07:58 -0700 Subject: Comment svgdev SNF 2006-08-05 21:28:55: low on developer Message-ID: refilled. From king at snf.stanford.edu Tue Aug 8 21:25:30 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 8 Aug 2006 21:25:30 -0700 Subject: Problem svgdev SNF 2006-08-08 21:25:30: Dripping liquid after development Message-ID: Liquid drips on the developed wafer and then dries it while on the track. Two wafers in a row, program 3. From vilanova at snf.stanford.edu Wed Aug 9 08:17:17 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Aug 2006 08:17:17 -0700 Subject: Problem svgdev SNF 2006-08-08 21:25:30: Dripping liquid after development Message-ID: Adjusted backside nozzle and water flow ( water flow was to strong ) Cycled wafers , ok to use. From me342b at snf.stanford.edu Sat Aug 12 03:27:10 2006 From: me342b at snf.stanford.edu (me342b at snf.stanford.edu) Date: Sat, 12 Aug 2006 03:27:10 -0700 Subject: Comment svgdev SNF 2006-08-12 03:27:09: non uniform puddling Message-ID: edges of wafer not covered when puddling From yeh at snf.stanford.edu Sat Aug 12 15:42:29 2006 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Sat, 12 Aug 2006 15:42:29 -0700 Subject: Problem svgdev SNF 2006-08-12 15:42:29: prog. 6 Message-ID: 1st puddle does not cover entire wafer => uneven development for spr220-7 From vilanova at snf.stanford.edu Mon Aug 14 08:16:14 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 14 Aug 2006 08:16:14 -0700 Subject: Comment svgdev SNF 2006-08-12 03:27:09: non uniform puddling Message-ID: added developer to canister, adjusted stream2 flow, ok to use. From vilanova at snf.stanford.edu Mon Aug 14 08:16:46 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 14 Aug 2006 08:16:46 -0700 Subject: Problem svgdev SNF 2006-08-12 15:42:29: prog. 6 Message-ID: adjusted strwam2 for program # 6, cycled wafers , good to use. From mahnaz at snf.stanford.edu Mon Aug 14 16:08:30 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 14 Aug 2006 16:08:30 -0700 Subject: Problem svgdev SNF 2006-08-14 16:08:29: not covering the wafers Message-ID: Jenny and hyunjoo are running the test wafers for litho and only 80% of wafers covered with developer. the tank is full. From vilanova at snf.stanford.edu Wed Aug 16 14:10:44 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 16 Aug 2006 14:10:44 -0700 Subject: Problem svgdev SNF 2006-08-14 16:08:29: not covering the wafers Message-ID: dispense for program # 6 adjusted , cycled wafers, developer covering 100% wafer area, ok to use.