From hopcroft at snf.stanford.edu Tue Feb 14 11:51:49 2006 From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu) Date: Tue, 14 Feb 2006 11:51:49 -0800 Subject: Problem svgdev SNF 2006-02-14 11:51:49: wafers load off-center Message-ID: 2 out of 3 wafers load off-center on the spinner. Looks bad, sounds bad. From vilanova at snf.stanford.edu Tue Feb 14 14:40:59 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 14 Feb 2006 14:40:59 -0800 Subject: Problem svgdev SNF 2006-02-14 11:51:49: wafers load off-center Message-ID: adjusted wafer centering flags , cycled wafers , ok to use. From vilanova at snf.stanford.edu Wed Feb 15 10:30:39 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 15 Feb 2006 10:30:39 -0800 Subject: Shutdown svgdev SNF 2006-02-15 10:30:38: Weekly Pm In progress........ Message-ID: From vilanova at snf.stanford.edu Wed Feb 15 10:59:45 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 15 Feb 2006 10:59:45 -0800 Subject: Shutdown svgdev SNF 2006-02-15 10:30:38: Weekly Pm In progress........ Message-ID: Pm Completed. ok to use. From saurabhc at snf.stanford.edu Wed Feb 15 12:11:43 2006 From: saurabhc at snf.stanford.edu (saurabhc at snf.stanford.edu) Date: Wed, 15 Feb 2006 12:11:43 -0800 Subject: Problem svgdev SNF 2006-02-15 12:11:42: Wafer stuck on the developer chuck Message-ID: The wafer got stuck on the developer chuck and the process jumped to step 3 without going through steps 1 and 2. From vilanova at snf.stanford.edu Wed Feb 15 14:05:46 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 15 Feb 2006 14:05:46 -0800 Subject: Problem svgdev SNF 2006-02-15 12:11:42: Wafer stuck on the developer chuck Message-ID: Cycled wafers ( 5 ) Twice and I could not repeat problem , I will keep an eye on it. , ok to use.