From mahnaz at snf.stanford.edu Tue May 2 16:11:19 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 2 May 2006 16:11:19 -0700 Subject: Problem svgdev SNF 2006-05-02 16:11:17: loose the vaccum after is developed and Message-ID: would not go to bake station. reset the track and watched the next few people suffer as well. Not sure why is doing that ?! so every one in line to use svgdev2. From vilanova at snf.stanford.edu Wed May 3 06:58:35 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 3 May 2006 06:58:35 -0700 Subject: Comment svgdev SNF 2006-04-15 19:29:44: Low Liquid Level Alarm Message-ID: Found Canister low on developer , refilled canister cycled wafers using different Programs and bake programs , everything Works ok , ready to use. From vilanova at snf.stanford.edu Wed May 3 06:59:07 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 3 May 2006 06:59:07 -0700 Subject: Problem svgdev SNF 2006-05-02 16:11:17: loose the vaccum after is developed and Message-ID: Canister low On ldd26W, Refilled canister , cycled wafers, ok to use. From kimsangb at snf.stanford.edu Wed May 3 22:23:11 2006 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Wed, 3 May 2006 22:23:11 -0700 Subject: Problem svgdev SNF 2006-05-03 22:23:11: the wafer was stuck at the spin station Message-ID: My last wafer was stuck at the spin station and svgdev didn't let it move to the next oven station. Manhaz had to manually transfer the wafer to another track. She says it is a very frequent problem thesedays that needs to be fixed. From vilanova at snf.stanford.edu Thu May 4 14:49:54 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 May 2006 14:49:54 -0700 Subject: Problem svgdev SNF 2006-05-03 22:23:11: the wafer was stuck at the spin station Message-ID: Replaced Solenoid Valve ,Cycled wafers , ok to use. From tura at snf.stanford.edu Thu May 11 12:49:55 2006 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Thu, 11 May 2006 12:49:55 -0700 Subject: Comment svgdev SNF 2006-05-11 12:49:54: low developer alarm Message-ID: From vilanova at snf.stanford.edu Thu May 11 13:14:41 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 11 May 2006 13:14:41 -0700 Subject: Comment svgdev SNF 2006-05-11 12:49:54: low developer alarm Message-ID: refilled canister , good to use. From king at snf.stanford.edu Tue May 30 15:24:04 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 30 May 2006 15:24:04 -0700 Subject: Problem svgdev SNF 2006-05-30 15:24:03: track seems stuck Message-ID: arms won't move. From vilanova at snf.stanford.edu Wed May 31 08:16:26 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 31 May 2006 08:16:26 -0700 Subject: Shutdown svgdev SNF 2006-05-31 08:16:26: maintenance in progress..... Message-ID: From vilanova at snf.stanford.edu Wed May 31 10:14:49 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 31 May 2006 10:14:49 -0700 Subject: Problem svgdev SNF 2006-05-30 15:24:03: track seems stuck Message-ID: MOnthly Pm Completed, Found one of the air hoses disconnected, Calibrated spindle , cycled wafers, ok to use. From vilanova at snf.stanford.edu Wed May 31 10:15:34 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 31 May 2006 10:15:34 -0700 Subject: Shutdown svgdev SNF 2006-05-31 08:16:26: maintenance in progress..... Message-ID: Maintenance Completed, Please read previous message.