From sujaybr at snf.stanford.edu Tue Apr 3 01:42:30 2007 From: sujaybr at snf.stanford.edu (sujaybr at snf.stanford.edu) Date: Tue, 3 Apr 2007 01:42:30 -0700 Subject: Problem svgdev SNF 2007-04-03 01:42:29: Message-ID: gets stuck downstream From vilanova at snf.stanford.edu Tue Apr 3 07:31:09 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 Apr 2007 07:31:09 -0700 Subject: Problem svgdev SNF 2007-04-03 01:42:29: Message-ID: Refiil tank, Cycled wafers , Good to use. From jprovine at snf.stanford.edu Wed Apr 4 11:21:35 2007 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 4 Apr 2007 11:21:35 -0700 Subject: Problem svgdev SNF 2007-04-04 11:21:34: developer residue left on backside Message-ID: svgdev is leaving developer residue on the backside of the wafer while the front track is leaving chuck marks from residue. in both cases be sure to clean the wafer before moving on to other machines (spin rinse dry is sufficient). From vilanova at snf.stanford.edu Wed Apr 4 11:45:58 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 4 Apr 2007 11:45:58 -0700 Subject: Problem svgdev SNF 2007-04-04 11:21:34: developer residue left on backside Message-ID: adjsuted DI water flow on both tracks, adjusted developer flow on both tracks, cycled wafers , ok to use. From rcordova at snf.stanford.edu Tue Apr 17 09:32:12 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 17 Apr 2007 09:32:12 -0700 Subject: Problem svgdev SNF 2007-04-17 09:32:11: Wafers not making vacuum every time Message-ID: chuck seems to hesitate before holding vacuum. Seen on standard silicon wafers four out of nine times.. From vilanova at snf.stanford.edu Tue Apr 17 10:10:55 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 17 Apr 2007 10:10:55 -0700 Subject: Problem svgdev SNF 2007-04-17 09:32:11: Wafers not making vacuum every time Message-ID: adjusted air sensor, cycled wafers, ok to use. From sjo at snf.stanford.edu Wed Apr 18 15:22:48 2007 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Wed, 18 Apr 2007 15:22:48 -0700 Subject: Problem svgdev SNF 2007-04-18 15:22:47: Doesn't work Message-ID: The spinner doesn't recognize the wafer arriving, bands keep spinning, nothing happens From rik at snf.stanford.edu Thu Apr 19 02:05:10 2007 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Thu, 19 Apr 2007 02:05:10 -0700 Subject: Shutdown svgdev SNF 2007-04-19 02:05:09: As previous user mentioned - track is not functional Message-ID: Tried rebooting the track, but the developer chuck is still not recognizing when it has a wafer on it. Probably a sensor problem. From vilanova at snf.stanford.edu Thu Apr 19 10:46:04 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 19 Apr 2007 10:46:04 -0700 Subject: Shutdown svgdev SNF 2007-04-19 02:05:09: As previous user mentioned - track is not functional Message-ID: cleaned and adjusted wafer carrier sensor, cycled wafers ok to use. From vilanova at snf.stanford.edu Thu Apr 19 10:46:17 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 19 Apr 2007 10:46:17 -0700 Subject: Problem svgdev SNF 2007-04-18 15:22:47: Doesn't work Message-ID: Please read previous message. From jparker at snf.stanford.edu Sat Apr 21 10:58:08 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Sat, 21 Apr 2007 10:58:08 -0700 Subject: Problem svgdev SNF 2007-04-21 10:58:07: Sensors not responding Message-ID: -Sensors in developer section don't always sense a wafer present. Developer conveyer belt keeps running with a wafer sitting directly under nozzle but isn't allowed to pass (saw this running 2 wafers with programs dev:9/oven:1). -Also, sometimes belt under send indexer will stop running prematurely and the indexer will get stuck on a wafer that wasn't ejected entirely. From fengj at snf.stanford.edu Tue Apr 24 20:58:46 2007 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Tue, 24 Apr 2007 20:58:46 -0700 Subject: Problem svgdev SNF 2007-04-24 20:58:45: Sensor needs to be fixed Message-ID: I am reporting it as a problem because the hot-plate can be used. But so many people are waiting to use the developer on Track #2. From vilanova at snf.stanford.edu Wed Apr 25 06:56:40 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 25 Apr 2007 06:56:40 -0700 Subject: Shutdown svgdev SNF 2007-04-25 06:56:40: Waiting for sensors ( they should come in today ) Message-ID: We are still waiting for the new sensors to come in but since people are still trying to use it , I wil shut it down until we get the parts. From gsosa at snf.stanford.edu Fri Apr 27 08:29:13 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 27 Apr 2007 08:29:13 -0700 Subject: Shutdown svgdev SNF 2007-04-25 06:56:40: Waiting for sensors ( they should come in today ) Message-ID: One of the 2 air sensors on the develop module rails is bad. Temporary repair in place. Bypassed the faulty air sensor. Air sensor is on order. System OK to use with one air sensor. From vilanova at snf.stanford.edu Fri Apr 27 13:34:20 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 27 Apr 2007 13:34:20 -0700 Subject: Problem svgdev SNF 2007-04-24 20:58:45: Sensor needs to be fixed Message-ID: refilled canister, ok to use.