From dejia at snf.stanford.edu  Thu Aug  9 10:02:37 2007
From: dejia at snf.stanford.edu (dejia at snf.stanford.edu)
Date: Thu, 9 Aug 2007 10:02:37 -0700
Subject: Comment svgdev SNF 2007-08-09 10:02:37: broken wafer stuck in track 1
Message-ID: <mailman.517.1357938755.25901.svgdev-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Fri Aug 10 07:57:28 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 10 Aug 2007 07:57:28 -0700
Subject: Comment svgdev SNF 2007-08-09 10:02:37: broken wafer stuck in track 1
Message-ID: <mailman.518.1357938755.25901.svgdev-pcs@snf.stanford.edu>

REMOVED BROKEN WAFER, CLEANED CATCH CUP ,
CHUCK, RAIL  TRANSFER BELTS & POST BAKE HOTPLATE,
CYCLED WAFERS , READY TO USE



From uli at snf.stanford.edu  Fri Aug 10 10:59:12 2007
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Fri, 10 Aug 2007 10:59:12 -0700
Subject: Comment svgdev SNF 2007-08-10 10:59:12: updated program sheet
Message-ID: <mailman.519.1357938755.25901.svgdev-pcs@snf.stanford.edu>




From jrjain at snf.stanford.edu  Sat Aug 25 02:05:33 2007
From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu)
Date: Sat, 25 Aug 2007 02:05:33 -0700
Subject: Problem svgdev SNF 2007-08-25 02:05:33: Dripping developer
Message-ID: <mailman.520.1357938755.25901.svgdev-pcs@snf.stanford.edu>

At the end of a develop cycle, develop drop is left hanging at end of nozzle.  On occassion, droplet will drop onto wafer before it proceeds to bake station.  At bake station, droplet starts to boil and leaves residue.



From vilanova at snf.stanford.edu  Mon Aug 27 07:42:57 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 27 Aug 2007 07:42:57 -0700
Subject: Problem svgdev SNF 2007-08-25 02:05:33: Dripping developer
Message-ID: <mailman.521.1357938755.25901.svgdev-pcs@snf.stanford.edu>

developer dispense adjusted , cycled wafers, no more
extra drops, ok to use. 



From vilanova at snf.stanford.edu  Tue Aug 28 08:53:03 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 28 Aug 2007 08:53:03 -0700
Subject: Shutdown svgdev SNF 2007-08-28 08:53:03: Under maintenance , Stay tuned....... 
Message-ID: <mailman.522.1357938755.25901.svgdev-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Tue Aug 28 09:31:10 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 28 Aug 2007 09:31:10 -0700
Subject: Shutdown svgdev SNF 2007-08-28 08:53:03: Under maintenance , Stay tuned....... 
Message-ID: <mailman.523.1357938755.25901.svgdev-pcs@snf.stanford.edu>

solder transfer wafer motor wire, cycled wafers
ok to use. 



From pganesan at snf.stanford.edu  Wed Aug 29 12:12:22 2007
From: pganesan at snf.stanford.edu (pganesan at snf.stanford.edu)
Date: Wed, 29 Aug 2007 12:12:22 -0700
Subject: Comment svgdev SNF 2007-08-29 12:12:21: upstream error
Message-ID: <mailman.524.1357938755.25901.svgdev-pcs@snf.stanford.edu>

get an upstream error and send indexer resets. program completes normally.