From calarrudo at snf.stanford.edu Mon Feb 5 12:00:49 2007 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Mon, 5 Feb 2007 12:00:49 -0800 Subject: Problem svgdev SNF 2007-02-05 12:00:49: track not dispensing wafer Message-ID: Track 1 develop is not dispensing wafer from carrier. From mahnaz at snf.stanford.edu Mon Feb 5 14:07:40 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 5 Feb 2007 14:07:40 -0800 Subject: Problem svgdev SNF 2007-02-05 12:00:49: track not dispensing wafer Message-ID: developer added by Maer C. and Dave C. tested the syste,m ok. From uyoon at snf.stanford.edu Wed Feb 7 09:26:47 2007 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Wed, 7 Feb 2007 09:26:47 -0800 Subject: Problem svgdev SNF 2007-02-07 09:26:47: backside rinse not working. Message-ID: From jparker at snf.stanford.edu Wed Feb 7 10:00:29 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 7 Feb 2007 10:00:29 -0800 Subject: Comment svgdev SNF 2007-02-07 10:00:28: Addendum: "backside rinse" problem Message-ID: "Backside rinse not working" problem is most visible in program 6 (significant amount of liquid residue within 1 cm of backside edges). Program 4: problem somewhat visible. Program 3: problem not visible (very little if any residue on back). From vilanova at snf.stanford.edu Wed Feb 7 11:16:19 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 7 Feb 2007 11:16:19 -0800 Subject: Comment svgdev SNF 2007-02-07 10:00:28: Addendum: "backside rinse" problem Message-ID: Adjusted the Bottom Noozle, Cycled my Glass wafer and bottom dispense ok now, ready to use. From vilanova at snf.stanford.edu Wed Feb 7 11:16:35 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 7 Feb 2007 11:16:35 -0800 Subject: Problem svgdev SNF 2007-02-07 09:26:47: backside rinse not working. Message-ID: Please read previous message. From peichen at snf.stanford.edu Thu Feb 8 16:46:04 2007 From: peichen at snf.stanford.edu (peichen at snf.stanford.edu) Date: Thu, 8 Feb 2007 16:46:04 -0800 Subject: Problem svgdev SNF 2007-02-08 16:46:03: smashed wafer pieces in the developer Message-ID: From vilanova at snf.stanford.edu Fri Feb 9 07:33:31 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Feb 2007 07:33:31 -0800 Subject: Problem svgdev SNF 2007-02-08 16:46:03: smashed wafer pieces in the developer Message-ID: removed broken wafer and cleaned catch cup, cycled wafer , system good to use. From dgunning at snf.stanford.edu Sun Feb 11 19:03:28 2007 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Sun, 11 Feb 2007 19:03:28 -0800 Subject: Problem svgdev SNF 2007-02-11 19:03:27: transfer to oven Message-ID: orange wires which transfer wafer to oven station are VERY slow. Alarm sounds before wafer reaches receiving cassette once wafer finishes oven cycle. From dgunning at snf.stanford.edu Sun Feb 11 19:07:56 2007 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Sun, 11 Feb 2007 19:07:56 -0800 Subject: Comment svgdev SNF 2007-02-11 19:07:56: transfer to oven Message-ID: there is no longer a problem. somehow the orange band had slipped from its groove...i just pushed it back on and it works fine now. From vilanova at snf.stanford.edu Mon Feb 12 06:41:15 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Feb 2007 06:41:15 -0800 Subject: Problem svgdev SNF 2007-02-11 19:03:27: transfer to oven Message-ID: TRansfer belt was out of place , user put i tback on , ok to use. From vilanova at snf.stanford.edu Mon Feb 12 06:41:27 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Feb 2007 06:41:27 -0800 Subject: Comment svgdev SNF 2007-02-11 19:07:56: transfer to oven Message-ID: read previous message. From jparker at snf.stanford.edu Fri Feb 16 10:20:34 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Fri, 16 Feb 2007 10:20:34 -0800 Subject: Problem svgdev SNF 2007-02-16 10:20:34: Backside rinse not working Message-ID: Same problem as Feb. 7, 2007: Wet residue left on back of wafers within half a centimeter of edge. Most obvious for programs 6 and 7 w/ no bake afterwards. From vilanova at snf.stanford.edu Fri Feb 16 10:57:20 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 16 Feb 2007 10:57:20 -0800 Subject: Problem svgdev SNF 2007-02-16 10:20:34: Backside rinse not working Message-ID: backside rinse nozzle was out of position, Adjusted Bottom Nozzle , Cycled Glass wafer to check Rinse dispense Dispensing working Good now, ok to use. From jparker at snf.stanford.edu Fri Feb 23 10:00:15 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Fri, 23 Feb 2007 10:00:15 -0800 Subject: Problem svgdev SNF 2007-02-23 10:00:14: Program 6: backside left wet still Message-ID: Residue left on backside looks better (more even, less of it), but there is still about 0.5 cm of wet residue left on backside of silicon wafer for program 6, no bake. From vilanova at snf.stanford.edu Fri Feb 23 11:10:02 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 23 Feb 2007 11:10:02 -0800 Subject: Problem svgdev SNF 2007-02-23 10:00:14: Program 6: backside left wet still Message-ID: Adjusted Nozzle, cycled wafers ok to use. From jimbond at snf.stanford.edu Wed Feb 28 14:55:19 2007 From: jimbond at snf.stanford.edu (jimbond at snf.stanford.edu) Date: Wed, 28 Feb 2007 14:55:19 -0800 Subject: Problem svgdev SNF 2007-02-28 14:55:19: loading cassette doesn't go down Message-ID: Have to use manual to develop From uyoon at snf.stanford.edu Wed Feb 28 17:33:36 2007 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Wed, 28 Feb 2007 17:33:36 -0800 Subject: Problem svgdev SNF 2007-02-28 14:55:19: loading cassette doesn't go down Message-ID: developer tank was empty. filled and working okay