From huangzb at snf.stanford.edu Thu May 3 22:56:08 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Thu, 3 May 2007 22:56:08 -0700 Subject: Shutdown svgdev SNF 2007-05-03 22:56:07: spin coater not rotating Message-ID: From huangzb at snf.stanford.edu Thu May 3 23:08:43 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Thu, 3 May 2007 23:08:43 -0700 Subject: Problem svgdev SNF 2007-05-03 23:08:42: spin coater rotate again Message-ID: I do not know the reason and I do not know if the coating thickness is trustable From huangzb at snf.stanford.edu Thu May 3 23:21:34 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Thu, 3 May 2007 23:21:34 -0700 Subject: Problem svgdev SNF 2007-05-03 23:21:33: sorry shutdown the wrong machine, should be svgcoat Message-ID: From vilanova at snf.stanford.edu Fri May 4 06:42:18 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 4 May 2007 06:42:18 -0700 Subject: Shutdown svgdev SNF 2007-05-03 22:56:07: spin coater not rotating Message-ID: User shutdown the wrong machine. From vilanova at snf.stanford.edu Fri May 4 06:42:44 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 4 May 2007 06:42:44 -0700 Subject: Problem svgdev SNF 2007-05-03 23:08:42: spin coater rotate again Message-ID: This is not the coater , this is the developer track. From vilanova at snf.stanford.edu Fri May 4 06:42:51 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 4 May 2007 06:42:51 -0700 Subject: Problem svgdev SNF 2007-05-03 23:21:33: sorry shutdown the wrong machine, should be svgcoat Message-ID: CLeared. From yspark at snf.stanford.edu Tue May 8 17:39:09 2007 From: yspark at snf.stanford.edu (yspark at snf.stanford.edu) Date: Tue, 8 May 2007 17:39:09 -0700 Subject: Problem svgdev SNF 2007-05-08 17:39:08: Wafer transfer Message-ID: Not able to upload wafer from source cassette. From vilanova at snf.stanford.edu Wed May 9 07:16:28 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 May 2007 07:16:28 -0700 Subject: Problem svgdev SNF 2007-05-08 17:39:08: Wafer transfer Message-ID: Refilled canister, cycled wafers, ok to use. From jcdoll at snf.stanford.edu Sun May 13 16:42:23 2007 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Sun, 13 May 2007 16:42:23 -0700 Subject: Problem svgdev SNF 2007-05-13 16:42:22: conveyor belt not running Message-ID: the conveyor belt under the send indexer does not run. sensors appear to sense wafer because indexer stops going down. tried with multiple indexers and dummy wafers, can't run any wafers through track 1. From jcdoll at snf.stanford.edu Sun May 13 16:43:24 2007 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Sun, 13 May 2007 16:43:24 -0700 Subject: Shutdown svgdev SNF 2007-05-13 16:43:23: send conveyor belt does not run Message-ID: the conveyor belt under the send indexer does not run. sensors appear to sense wafer because indexer stops going down. tried with multiple indexers and dummy wafers, can't run any wafers through track 1. From gsosa at snf.stanford.edu Mon May 14 07:44:29 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 14 May 2007 07:44:29 -0700 Subject: Shutdown svgdev SNF 2007-05-13 16:43:23: send conveyor belt does not run Message-ID: Refilled the developer canister. Tested operation. All OK. From gsosa at snf.stanford.edu Mon May 14 07:47:36 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 14 May 2007 07:47:36 -0700 Subject: Problem svgdev SNF 2007-05-13 16:42:22: conveyor belt not running Message-ID: Refilled the deveoper canister. tested track. All OK. From mahnaz at snf.stanford.edu Mon May 14 11:03:00 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 14 May 2007 11:03:00 -0700 Subject: Problem svgdev SNF 2007-05-14 11:02:59: some times not enough developer Message-ID: one of Rosie's wafer came out bad. From rcordova at snf.stanford.edu Mon May 14 11:10:54 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Mon, 14 May 2007 11:10:54 -0700 Subject: Problem svgdev SNF 2007-05-14 11:10:53: Not sensing wafer at send cassette Message-ID: Intermittantly, not seeing the wafer, have to hit "wafer lost" From rcordova at snf.stanford.edu Mon May 14 11:15:59 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Mon, 14 May 2007 11:15:59 -0700 Subject: Problem svgdev SNF 2007-05-14 11:15:59: Puddle develop not reaching edges Message-ID: I watched the dispense of the first develop step, and the wafer does not continue to turn "slowly" to get the developer to the edges. Causing Poor develop. From gsosa at snf.stanford.edu Mon May 14 15:03:03 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 14 May 2007 15:03:03 -0700 Subject: Problem svgdev SNF 2007-05-14 11:02:59: some times not enough developer Message-ID: Checked canister pressure- OK. Tested with program 3. Wafer not spinning at low speed. no rotation during puddle dispense(80 RPM) . Program OK. Did spindle calibration and tested. All looks OK. From gsosa at snf.stanford.edu Mon May 14 15:03:55 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 14 May 2007 15:03:55 -0700 Subject: Problem svgdev SNF 2007-05-14 11:15:59: Puddle develop not reaching edges Message-ID: Wafers not spinning at low speed. Recalibrated spindle motor. All OK now. From gsosa at snf.stanford.edu Mon May 14 15:05:19 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 14 May 2007 15:05:19 -0700 Subject: Problem svgdev SNF 2007-04-21 10:58:07: Sensors not responding Message-ID: Replaced and adjusted front rail sensor for wafer present. Tested both front and rear wafer sensors. All OK. From vilanova at snf.stanford.edu Thu May 17 07:54:41 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 17 May 2007 07:54:41 -0700 Subject: Shutdown svgdev SNF 2007-05-17 07:54:41: Testing Intermitent Indexer problem..... Message-ID: From vilanova at snf.stanford.edu Thu May 17 08:16:44 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 17 May 2007 08:16:44 -0700 Subject: Shutdown svgdev SNF 2007-05-17 07:54:41: Testing Intermitent Indexer problem..... Message-ID: replaced defective Indexer, Tested and cycled 10- wafers, ok to use. From vilanova at snf.stanford.edu Thu May 17 08:16:59 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 17 May 2007 08:16:59 -0700 Subject: Problem svgdev SNF 2007-05-14 11:10:53: Not sensing wafer at send cassette Message-ID: Please read previous message. From ccwan at snf.stanford.edu Wed May 30 12:03:18 2007 From: ccwan at snf.stanford.edu (ccwan at snf.stanford.edu) Date: Wed, 30 May 2007 12:03:18 -0700 Subject: Comment svgdev SNF 2007-05-30 12:03:18: SVG developer 1 receiver problem Message-ID: Receiver doesn't go down without manual intervention. From vilanova at snf.stanford.edu Wed May 30 13:37:55 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 30 May 2007 13:37:55 -0700 Subject: Comment svgdev SNF 2007-05-30 12:03:18: SVG developer 1 receiver problem Message-ID: checked developer level ( ok ) cycled wafers, I couldnt repeat the users problem, ok to use.