Comment svgdev SNF 2007-11-07 16:45:20:

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Wed Nov 7 16:45:21 PST 2007


I am  sending this email out with regards to developing asml  wafers with 955-.7 I line resist. If you see the circular ring on your wafers you may choose to develop with program 5 on the SVGdev2  which Is exact copy of program 2 without the rinse.
I have ran some wafers and still waiting for SEM result,  till  I get the result and be able to run more tests might be a while so I thought to share the information with you all.




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