From vilanova at snf.stanford.edu Mon Oct 1 07:23:56 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 1 Oct 2007 07:23:56 -0700 Subject: Problem svgdev SNF 2007-09-28 11:09:14: did not sense wafer Message-ID: Cycled wafers could not repeat the problem Both Indexer ( send and receive) are working fine, ok to use. From gibby at snf.stanford.edu Thu Oct 4 14:47:16 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Thu, 4 Oct 2007 14:47:16 -0700 Subject: Comment svgdev SNF 2007-10-04 14:47:15: i-line still under-developed around endge of wafer Message-ID: Dies not fully developed in outer 1/2" of wafer. From gibby at snf.stanford.edu Sat Oct 6 14:10:05 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Sat, 6 Oct 2007 14:10:05 -0700 Subject: Comment svgdev SNF 2007-10-06 14:10:05: i-line resist develop good Message-ID: This time the i-line resist develop was good. 1 um 955 resist, standard develop program. Resist on TiN. Exposure 130 mj/cm2, focus -02. um. From gibby at snf.stanford.edu Thu Oct 18 20:52:19 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Thu, 18 Oct 2007 20:52:19 -0700 Subject: Comment svgdev SNF 2007-10-18 20:52:19: i-line resist development normal Message-ID: i-line resist development was normal for both standard and non-standard resist thicknesses. It seems okay to green light system.