From nppatil at snf.stanford.edu Fri Sep 7 11:56:36 2007 From: nppatil at snf.stanford.edu (nppatil at snf.stanford.edu) Date: Fri, 7 Sep 2007 11:56:36 -0700 Subject: Problem svgdev SNF 2007-09-07 11:56:35: Does Not Accept Wafers Message-ID: Track does not accept wafers in Auto mode From vilanova at snf.stanford.edu Fri Sep 7 13:50:07 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 7 Sep 2007 13:50:07 -0700 Subject: Problem svgdev SNF 2007-09-07 11:56:35: Does Not Accept Wafers Message-ID: Checked and cycled wafers, Could not repeat the problem, ok to use. From vilanova at snf.stanford.edu Fri Sep 7 13:51:53 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 7 Sep 2007 13:51:53 -0700 Subject: Comment svgdev SNF 2007-08-29 12:12:21: upstream error Message-ID: Everytime you see the " upstream not ready" just press the clear button and that will take you to the main Programs screen , with or without the the upstream not ready message your wafers should run fine. Ok to use. From gth at snf.stanford.edu Fri Sep 7 18:59:53 2007 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Fri, 7 Sep 2007 18:59:53 -0700 Subject: Problem svgdev SNF 2007-09-07 18:59:53: dummies needed Message-ID: short of dummy wafers From gth at snf.stanford.edu Mon Sep 10 02:00:57 2007 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 10 Sep 2007 02:00:57 -0700 Subject: Problem svgdev SNF 2007-09-10 02:00:57: developer track stuck Message-ID: even after resetting, the developer track does not work. please look into this. thanks -gaurav From vilanova at snf.stanford.edu Mon Sep 10 07:26:56 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 10 Sep 2007 07:26:56 -0700 Subject: Problem svgdev SNF 2007-09-07 18:59:53: dummies needed Message-ID: dummy wafers added. From vilanova at snf.stanford.edu Mon Sep 10 08:00:24 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 10 Sep 2007 08:00:24 -0700 Subject: Problem svgdev SNF 2007-09-10 02:00:57: developer track stuck Message-ID: developer track back up, canister was almost out of developer. added developer ( Lddw26) cycled wafers, ok to use. From yoneoka at snf.stanford.edu Mon Sep 17 17:38:49 2007 From: yoneoka at snf.stanford.edu (yoneoka at snf.stanford.edu) Date: Mon, 17 Sep 2007 17:38:49 -0700 Subject: Problem svgdev SNF 2007-09-17 17:38:48: Wafer transfer didn't start Message-ID: Wafer transfer doen't strart even if push start From vilanova at snf.stanford.edu Tue Sep 18 10:05:32 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 18 Sep 2007 10:05:32 -0700 Subject: Problem svgdev SNF 2007-09-17 17:38:48: Wafer transfer didn't start Message-ID: Wafer Transfer working fine, I cycled many wafers and I could not repeat the problem , ok to use. From gibby at snf.stanford.edu Tue Sep 18 18:12:03 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Tue, 18 Sep 2007 18:12:03 -0700 Subject: Problem svgdev SNF 2007-09-18 18:12:03: Back track misbehaving Message-ID: Track would work fine for the first few wafers, then the send indexer would not load a wafer. Instead, the cassette did an index reset before automatically lowering itself to the next wafer. The wafer, however, did not load. Instead, the developer track kept spinning, even when a wafer was manually loaded. Weird. Recommend using the track in manual mode, until Mario can work his magic. From rcordova at snf.stanford.edu Wed Sep 19 09:50:20 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Wed, 19 Sep 2007 09:50:20 -0700 Subject: Shutdown svgdev SNF 2007-09-19 09:50:19: Wafers not sending to spincoat Message-ID: System is not working properly. See previous message. From gsosa at snf.stanford.edu Wed Sep 19 12:06:16 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 19 Sep 2007 12:06:16 -0700 Subject: Shutdown svgdev SNF 2007-09-19 09:50:19: Wafers not sending to spincoat Message-ID: System was having intermittant wafer handling issues. Wafers not sending out of send indexer and developer chuck moving to up/load position with no wafer present. Troubleshot and determined that 1 of the 2 rail sensors was changing states causing the indexer to think that a wafer was recieved at the developer and for the developer to think that it had a wafer at the chuck. Sensor air flow OK. Checked and found oxidation on the terminals of 1 of the sensors. Cleaned the terminal contacts. Tested wafer handling. Ran 100 + wafers with no failures. System OK to use. GS From gsosa at snf.stanford.edu Wed Sep 19 12:07:05 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 19 Sep 2007 12:07:05 -0700 Subject: Problem svgdev SNF 2007-09-18 18:12:03: Back track misbehaving Message-ID: System repaired and OK to use see comments from shutdown 9/19/2007. GS From sinwood at snf.stanford.edu Thu Sep 20 14:18:41 2007 From: sinwood at snf.stanford.edu (sinwood at snf.stanford.edu) Date: Thu, 20 Sep 2007 14:18:41 -0700 Subject: Problem svgdev SNF 2007-09-20 14:18:41: Won't run Message-ID: can't program; dummy wafer stuck in developer. From gsosa at snf.stanford.edu Fri Sep 21 09:23:10 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Sep 2007 09:23:10 -0700 Subject: Problem svgdev SNF 2007-09-20 14:18:41: Won't run Message-ID: Ran track in normal operation. Could not recreate problem. System OK to use. From gsosa at snf.stanford.edu Wed Sep 26 17:09:50 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 26 Sep 2007 17:09:50 -0700 Subject: Problem svgdev SNF 2007-09-26 17:09:49: I-Line develop issues with ASM-L Stepper Message-ID: Still working on developer non-uniformity issues with I-line ASM-L Process.Further investigation to be done. Track OK to use with caution. Please make note of any unusual developer issues. GS From afong at snf.stanford.edu Fri Sep 28 11:09:15 2007 From: afong at snf.stanford.edu (afong at snf.stanford.edu) Date: Fri, 28 Sep 2007 11:09:15 -0700 Subject: Problem svgdev SNF 2007-09-28 11:09:14: did not sense wafer Message-ID: did not sense wafer from cassette to developer module