From mahnaz at snf.stanford.edu  Tue Dec  9 13:12:38 2008
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Tue, 9 Dec 2008 13:12:38 -0800
Subject: Shutdown svgdev SNF 2008-12-09 13:12:37: low dev LDD26w
Message-ID: <mailman.664.1357938756.25901.svgdev-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Tue Dec  9 13:31:12 2008
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 9 Dec 2008 13:31:12 -0800
Subject: Shutdown svgdev SNF 2008-12-09 13:12:37: low dev LDD26w
Message-ID: <mailman.665.1357938756.25901.svgdev-pcs@snf.stanford.edu>

Refilled the developer canister



From huigensr at snf.stanford.edu  Wed Dec 10 14:13:38 2008
From: huigensr at snf.stanford.edu (huigensr at snf.stanford.edu)
Date: Wed, 10 Dec 2008 14:13:38 -0800
Subject: Shutdown svgdev SNF 2008-12-10 14:13:37: loose rubber band...wafers won't load
Message-ID: <mailman.666.1357938756.25901.svgdev-pcs@snf.stanford.edu>

Rubber band at edge of a the bake station...very loose but does not appears broken. Cassetts won't engage.



From gsosa at snf.stanford.edu  Wed Dec 10 17:05:10 2008
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 10 Dec 2008 17:05:10 -0800
Subject: Shutdown svgdev SNF 2008-12-10 14:13:37: loose rubber band...wafers won't load
Message-ID: <mailman.667.1357938756.25901.svgdev-pcs@snf.stanford.edu>

Indexers would not operate because system was in manual. Checked and replaced the drive belt on Hot plate oven. Inspected transfer belts- All OK. Drive belt on reciever appears too loose. Replaced all drive belts and reansfer belts with correct high temp res silicon belts. Checked transfer and adjusted HPO belt speed for wafer centering on hot plate. Cycled wafers- All OK.