From vilanova at snf.stanford.edu Thu Jan 3 11:19:47 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 3 Jan 2008 11:19:47 -0800 Subject: Shutdown svgdev SNF 2007-12-19 07:21:08: holiday shutdown Message-ID: system back on . From mtang at snf.stanford.edu Wed Jan 9 09:42:35 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 9 Jan 2008 09:42:35 -0800 Subject: Problem svgdev SNF 2007-09-26 17:09:49: I-Line develop issues with ASM-L Stepper Message-ID: See Mahnaz's resolution of this. New program #5. From vilanova at snf.stanford.edu Fri Jan 11 08:00:04 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2008 08:00:04 -0800 Subject: Comment svgdev SNF 2008-01-11 08:00:03: cleaned transfer belts rollers Message-ID: Cleaned transfer belts rollers ( I noticed yesterday that some of them were dirty and not working properly ) this cause the wafer to get stuck before the post bake step, Works good now. From calarrudo at snf.stanford.edu Tue Jan 22 16:42:42 2008 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Tue, 22 Jan 2008 16:42:42 -0800 Subject: Problem svgdev SNF 2008-01-22 16:42:41: Track will not index Message-ID: From gsosa at snf.stanford.edu Wed Jan 23 08:31:24 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 23 Jan 2008 08:31:24 -0800 Subject: Problem svgdev SNF 2008-01-22 16:42:41: Track will not index Message-ID: Cassette switch not sensing the cassette. adjusted the cassette switch. Tested operation. All OK. M&G From hyungkyu at snf.stanford.edu Wed Jan 23 18:20:15 2008 From: hyungkyu at snf.stanford.edu (hyungkyu at snf.stanford.edu) Date: Wed, 23 Jan 2008 18:20:15 -0800 Subject: Comment svgdev SNF 2008-01-23 18:20:14: developer does not accept wafers well Message-ID: It has problem with detecting and accepting a wafer from the input cassette. From jparker at snf.stanford.edu Thu Jan 24 08:47:53 2008 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Thu, 24 Jan 2008 08:47:53 -0800 Subject: Problem svgdev SNF 2008-01-24 08:47:52: Send indexer sensor broken Message-ID: -Same as reported by hyungkyu on 1/23. -Send indexer drops down, wafer is not sensed, and indexer&wafer hang on the belt. -Can pull wafer out by hand, hit start, and add wafer to dev belt by hand as a workaround. -Conditions:Tried both with wafer in bottom slot and wafer in top slot, both had same problem. This was using dev3/bake1. From vilanova at snf.stanford.edu Thu Jan 24 10:43:50 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 24 Jan 2008 10:43:50 -0800 Subject: Shutdown svgdev SNF 2008-01-24 10:43:50: working on defective Send Indexer sensors......... Message-ID: From gsosa at snf.stanford.edu Thu Jan 24 17:16:19 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 24 Jan 2008 17:16:19 -0800 Subject: Shutdown svgdev SNF 2008-01-24 10:43:50: working on defective Send Indexer sensors......... Message-ID: New indexer did not work and took out CPU and track interface PC boards. Replaced the CPU and track interface pcb's. Reprogrammed the track( dev / bake programs and option settings.Adjusted air to send indexer wafer sensor. Calibrated spindle and HPO. Tested operation. All OK. From vilanova at snf.stanford.edu Fri Jan 25 07:00:29 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 25 Jan 2008 07:00:29 -0800 Subject: Problem svgdev SNF 2008-01-24 08:47:52: Send indexer sensor broken Message-ID: New indexer did not work and took out CPU and track interface PC boards. Replaced the CPU and track interface pcb's. Reprogrammed the track( dev / bake programs and option settings.Adjusted air to send indexer wafer sensor. Calibrated spindle and HPO. Tested operation. All OK.