Problem svgdev SNF 2008-01-24 08:47:52: Send indexer sensor broken

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Jan 25 07:00:29 PST 2008


New indexer did not work and took out CPU and track interface PC boards. Replaced the CPU and track interface pcb's. Reprogrammed the track( dev / bake programs and option settings.Adjusted air to send indexer wafer sensor. Calibrated spindle and HPO. Tested operation. All OK.




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