From king at snf.stanford.edu  Wed Jul  2 22:14:29 2008
From: king at snf.stanford.edu (king at snf.stanford.edu)
Date: Wed, 2 Jul 2008 22:14:29 -0700
Subject: Problem svgdev SNF 2008-07-02 22:14:29: track not loading onto chuck
Message-ID: <mailman.621.1357938756.25901.svgdev-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Thu Jul  3 07:59:02 2008
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Thu, 3 Jul 2008 07:59:02 -0700
Subject: Problem svgdev SNF 2008-07-02 22:14:29: track not loading onto chuck
Message-ID: <mailman.622.1357938756.25901.svgdev-pcs@snf.stanford.edu>

Tested track operation with dummy wafers and standard program. All tested OK.



From gth at snf.stanford.edu  Fri Jul  4 14:34:14 2008
From: gth at snf.stanford.edu (gth at snf.stanford.edu)
Date: Fri, 4 Jul 2008 14:34:14 -0700
Subject: Problem svgdev SNF 2008-07-04 14:34:12: shaky transfer
Message-ID: <mailman.623.1357938756.25901.svgdev-pcs@snf.stanford.edu>

the tracks look shaky, please check transfer of wafer from developer to hot plate



From gsosa at snf.stanford.edu  Sat Jul  5 12:35:32 2008
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Sat, 5 Jul 2008 12:35:32 -0700
Subject: Problem svgdev SNF 2008-07-04 14:34:12: shaky transfer
Message-ID: <mailman.624.1357938756.25901.svgdev-pcs@snf.stanford.edu>

Tested transfer and system functions with standard process recipes. All working OK.



From nxs4059 at snf.stanford.edu  Mon Jul  7 10:07:39 2008
From: nxs4059 at snf.stanford.edu (nxs4059 at snf.stanford.edu)
Date: Mon, 7 Jul 2008 10:07:39 -0700
Subject: Problem svgdev SNF 2008-07-07 10:07:37: slow belts on hot plate
Message-ID: <mailman.625.1357938756.25901.svgdev-pcs@snf.stanford.edu>

The hotplate belts were very slow to react/function.  this caused alarms at some points but they would eventually catch.  similarly they didn't get the wafers all the way into the reciever tray.



From vilanova at snf.stanford.edu  Mon Jul  7 10:51:07 2008
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 7 Jul 2008 10:51:07 -0700
Subject: Problem svgdev SNF 2008-07-07 10:07:37: slow belts on hot plate
Message-ID: <mailman.626.1357938756.25901.svgdev-pcs@snf.stanford.edu>

cycled wafers ( 7 each twice) and I could not repeat the
problem, ok to use.  



From jameson at snf.stanford.edu  Fri Jul 25 17:02:31 2008
From: jameson at snf.stanford.edu (jameson at snf.stanford.edu)
Date: Fri, 25 Jul 2008 17:02:31 -0700
Subject: Comment svgdev SNF 2008-07-25 17:02:30: prog 3 found modified
Message-ID: <mailman.627.1357938756.25901.svgdev-pcs@snf.stanford.edu>

Someone set the rinse time for step 5 of program 3 on both tracks to zero.